JPS64727A - Forming method of deposit film - Google Patents
Forming method of deposit filmInfo
- Publication number
- JPS64727A JPS64727A JP62073616A JP7361687A JPS64727A JP S64727 A JPS64727 A JP S64727A JP 62073616 A JP62073616 A JP 62073616A JP 7361687 A JP7361687 A JP 7361687A JP S64727 A JPS64727 A JP S64727A
- Authority
- JP
- Japan
- Prior art keywords
- film
- active species
- chamber
- period
- formation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 abstract 4
- 239000003054 catalyst Substances 0.000 abstract 2
- 229910000765 intermetallic Inorganic materials 0.000 abstract 2
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 239000002994 raw material Substances 0.000 abstract 2
- 239000007787 solid Substances 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 abstract 1
- 230000003213 activating effect Effects 0.000 abstract 1
- 230000004913 activation Effects 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 229910052736 halogen Inorganic materials 0.000 abstract 1
- 150000002367 halogens Chemical class 0.000 abstract 1
- 230000001939 inductive effect Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 239000011733 molybdenum Substances 0.000 abstract 1
- 230000000737 periodic effect Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Light Receiving Elements (AREA)
Abstract
PURPOSE: To form a deposit film, to lower even a substrate temperature at the time of the formation of the deposit film further and to manufacture the deposit film having the stable quality of the film industrially at low cost in a large quantity by separately introducing active species formed from a compound containing carbon and halogen and a film-formation raw material into film formation space and working and reacting a catalyst consisting of a specific metal or metallic compound heated to these active species and raw material.
CONSTITUTION: Honeycomb molybdenum 112 as a catalyst composed of a metal or metallic compound selected from the element groups of the fourth period, the fifth period and the sixth period of the periodic table is supplied with electric power through a conductor 113, and brought to a red heat state. H2 gas mixed from a gas supply tube 107 is introduced into a film formation chamber 101. An activating chamber 108 is filled with solid C grains, the solid C grains are heated by an electric furnace as an activation energy source 109, C is brought to a red heat state, and CF4 gas is blown into the chamber 108 through the introducing tube 107, thus forming active species, then inducing the active species into the film formation chamber 101.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62073616A JPS64727A (en) | 1987-03-23 | 1987-03-27 | Forming method of deposit film |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62-65830 | 1987-03-23 | ||
| JP6583087 | 1987-03-23 | ||
| JP62073616A JPS64727A (en) | 1987-03-23 | 1987-03-27 | Forming method of deposit film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01727A JPH01727A (en) | 1989-01-05 |
| JPS64727A true JPS64727A (en) | 1989-01-05 |
Family
ID=26406978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62073616A Pending JPS64727A (en) | 1987-03-23 | 1987-03-27 | Forming method of deposit film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS64727A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009189907A (en) * | 2008-02-12 | 2009-08-27 | Nippon Soda Co Ltd | Agitator for small-size reactor |
-
1987
- 1987-03-27 JP JP62073616A patent/JPS64727A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009189907A (en) * | 2008-02-12 | 2009-08-27 | Nippon Soda Co Ltd | Agitator for small-size reactor |
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