JPS6473203A - Inspection of surface foreign matter - Google Patents
Inspection of surface foreign matterInfo
- Publication number
- JPS6473203A JPS6473203A JP23022287A JP23022287A JPS6473203A JP S6473203 A JPS6473203 A JP S6473203A JP 23022287 A JP23022287 A JP 23022287A JP 23022287 A JP23022287 A JP 23022287A JP S6473203 A JPS6473203 A JP S6473203A
- Authority
- JP
- Japan
- Prior art keywords
- foreign matter
- light reflecting
- reflecting film
- dimension
- magnified
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 title abstract 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To certainly protect foreign matter, by applying and forming a light reflecting film to the surface of an object to be inspected having foreign matter adhered thereto and measuring the foreign matter magnified by said light reflecting film. CONSTITUTION:A wafer 31 being an object to be inspected has a mirror like surface and foreign matter 32 having a dimension L0 is adhered to said surface. A light reflecting film 3 having a predetermined film thickness T0 is applied and formed to the entire surface of the wafer 3 of this state. The dimension of the foreign matter 32 covered with the light reflecting film 33 is apparently magnified to become a dimension L1. The foreign matter 32 thus magnified in its apparent dimension by the attachment of the light reflecting film 33 is detected by an inspection apparatus and the real dimension of the foreign matter 32 not containing the light reflecting film 33 is calculated from the apparent dimension of the foreign matter 32 containing the light reflecting film 33.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23022287A JPS6473203A (en) | 1987-09-14 | 1987-09-14 | Inspection of surface foreign matter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23022287A JPS6473203A (en) | 1987-09-14 | 1987-09-14 | Inspection of surface foreign matter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6473203A true JPS6473203A (en) | 1989-03-17 |
Family
ID=16904467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23022287A Pending JPS6473203A (en) | 1987-09-14 | 1987-09-14 | Inspection of surface foreign matter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6473203A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160121410A (en) * | 2015-04-09 | 2016-10-19 | 도쿄엘렉트론가부시키가이샤 | Foreign substance removal apparatus, foreign substance removal method, separation apparatus, foreign substance detection method, and foreign substance detection apparatus |
| JP2016200480A (en) * | 2015-04-09 | 2016-12-01 | 東京エレクトロン株式会社 | Foreign matter detection method, foreign matter detection device and peeling device |
| JP2016212009A (en) * | 2015-05-12 | 2016-12-15 | 信越半導体株式会社 | Defect inspection method |
-
1987
- 1987-09-14 JP JP23022287A patent/JPS6473203A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160121410A (en) * | 2015-04-09 | 2016-10-19 | 도쿄엘렉트론가부시키가이샤 | Foreign substance removal apparatus, foreign substance removal method, separation apparatus, foreign substance detection method, and foreign substance detection apparatus |
| JP2016200480A (en) * | 2015-04-09 | 2016-12-01 | 東京エレクトロン株式会社 | Foreign matter detection method, foreign matter detection device and peeling device |
| US10160015B2 (en) | 2015-04-09 | 2018-12-25 | Tokyo Electron Limited | Foreign substance removal apparatus and foreign substance detection apparatus |
| US20190105691A1 (en) * | 2015-04-09 | 2019-04-11 | Tokyo Electron Limited | Foreign substance removal apparatus and foreign substance detection apparatus |
| US10946419B2 (en) | 2015-04-09 | 2021-03-16 | Tokyo Electron Limited | Foreign substance removal apparatus and foreign substance detection apparatus |
| JP2016212009A (en) * | 2015-05-12 | 2016-12-15 | 信越半導体株式会社 | Defect inspection method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| FR2697086B1 (en) | Method and device for inspecting transparent material. | |
| DE69225117D1 (en) | Apparatus for measuring the thickness of thin films | |
| FI955715A7 (en) | Method and device for identifying named materials from the composition of an object | |
| IT1057087B (en) | TEST PROCEDURE FOR SEPARATE DETECTION OF DIFFERENT SURFACE DEFECTS IN THE PARTS AND DEVICE FOR EXECUTION OF THE PROCEDURE | |
| IL52768A (en) | Apparatus and method for the measurement of optical properties of small articles particularly of gems | |
| IT1107002B (en) | PROCEDURE AND DEVICE FOR THE OPTICAL DETECTION OF DEFECTS IN PARTICULARLY GLASS TRANSPARENT OBJECTS | |
| CA1032382A (en) | Method of automatically positioning the image and/or object surfaces in optical copiers | |
| DE69024412D1 (en) | Ultrasonic inspection device for the detection of defects in solids | |
| EP0303352A3 (en) | The method of optically measuring relative angular movement | |
| DE3688547D1 (en) | "DIFFRAKTOSIGHT" PROCESS. | |
| ATE212751T1 (en) | METHOD AND DEVICE FOR CHECKING SEMICONDUCTOR DISCS | |
| JPS56117154A (en) | Inspecting apparatus of flaw | |
| EP0491276A3 (en) | System and methods for measuring the haze of a thin film | |
| DE69304396D1 (en) | Device for measuring the thickness of thin layers of semiconductors | |
| IT1143380B (en) | PROCEDURE AND DEVICE FOR THE DETECTION OF SURFACE DEFECTS OF MECHANICAL PARTS, IN PARTICULAR OF PARTS WITH CURVED SURFACE | |
| DE68913347D1 (en) | Device for the investigation of surface defects in nuclear fuel tablets. | |
| DE69432457T2 (en) | Optical apparatus with device for detection of the viewing direction | |
| IT8423732A0 (en) | PROCEDURE FOR THE NONDESTRUCTIVE TESTING OF SURFACE DEFECTS. | |
| CA930214A (en) | Apparatus and method for optically inspecting the condition of a surface | |
| EP0452665A3 (en) | Device and scanning method for measuring the thickness of opaque or transparent coatings of any type using a laser | |
| BR8501767A (en) | PROCESS AND DEVICE FOR ULTRASONIC PIN TESTING WITH WALL THICKNESS DISCONTINUITY | |
| SE7714443L (en) | DEVICE FOR CHECKING CROSS-SECTION PROFILES | |
| IL61217A0 (en) | Method and apparatus for determining the velocity of light under varied environmental conditions in combination with an interferometer | |
| DE3471750D1 (en) | Optical testing device for the detection of surface defects on cables or lines | |
| DE2966138D1 (en) | A method of optical inspection for surface defects and the use of apparatus for carrying out said method |