JPS6473264A - Temperature controller - Google Patents

Temperature controller

Info

Publication number
JPS6473264A
JPS6473264A JP62229527A JP22952787A JPS6473264A JP S6473264 A JPS6473264 A JP S6473264A JP 62229527 A JP62229527 A JP 62229527A JP 22952787 A JP22952787 A JP 22952787A JP S6473264 A JPS6473264 A JP S6473264A
Authority
JP
Japan
Prior art keywords
controlled
heat medium
temperature
contact member
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62229527A
Other languages
Japanese (ja)
Inventor
Noriyasu Kawanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62229527A priority Critical patent/JPS6473264A/en
Publication of JPS6473264A publication Critical patent/JPS6473264A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PURPOSE:To enable effective control of the temperature of a part to be controlled with a less resistance of heat transfer, by eliminating a gap of a contact member with a heat medium exuding between the contact member and an object to be controlled therethrough. CONSTITUTION:As a test circuit board 13 approaches in the direction of a body 1, a cotton-like contact member 5 attaches tightly to an object 14 to be controlled following the shape thereof. With this, a heat medium 8 filling a fluid chamber 2 exudes to a contact interface to contact it evenly with a less resistance of heat transfer. Thereafter, simultaneously with the start of an operation test of the object 14 being controlled, a pump 9 is started to circulate the heat medium 11 through a fluid chamber 4. At this point, heat generated in the object 14 being controlled is transmitted to the heat medium 11 efficiently through the contact member 5. Then, a temperature control section 10 controls the flow rate, temperature and the like of the heat medium 11 to suppress the temperature of the object 14 being controlled to be detected through a temperature detector 12 in the manner not rising above a specified value.
JP62229527A 1987-09-16 1987-09-16 Temperature controller Pending JPS6473264A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62229527A JPS6473264A (en) 1987-09-16 1987-09-16 Temperature controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62229527A JPS6473264A (en) 1987-09-16 1987-09-16 Temperature controller

Publications (1)

Publication Number Publication Date
JPS6473264A true JPS6473264A (en) 1989-03-17

Family

ID=16893566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62229527A Pending JPS6473264A (en) 1987-09-16 1987-09-16 Temperature controller

Country Status (1)

Country Link
JP (1) JPS6473264A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06209059A (en) * 1992-08-03 1994-07-26 Brymill Corp Cooling of article and its device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06209059A (en) * 1992-08-03 1994-07-26 Brymill Corp Cooling of article and its device

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