JPS64736A - Ion beam device - Google Patents

Ion beam device

Info

Publication number
JPS64736A
JPS64736A JP62066882A JP6688287A JPS64736A JP S64736 A JPS64736 A JP S64736A JP 62066882 A JP62066882 A JP 62066882A JP 6688287 A JP6688287 A JP 6688287A JP S64736 A JPS64736 A JP S64736A
Authority
JP
Japan
Prior art keywords
beams
irradiation
signal
electron beams
ion beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62066882A
Other languages
English (en)
Other versions
JPH01736A (ja
Inventor
Toshio Yokoura
Kaoru Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP62-66882A priority Critical patent/JPH01736A/ja
Priority claimed from JP62-66882A external-priority patent/JPH01736A/ja
Publication of JPS64736A publication Critical patent/JPS64736A/ja
Publication of JPH01736A publication Critical patent/JPH01736A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP62-66882A 1987-03-20 イオンビ−ム装置 Pending JPH01736A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62-66882A JPH01736A (ja) 1987-03-20 イオンビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62-66882A JPH01736A (ja) 1987-03-20 イオンビ−ム装置

Publications (2)

Publication Number Publication Date
JPS64736A true JPS64736A (en) 1989-01-05
JPH01736A JPH01736A (ja) 1989-01-05

Family

ID=

Similar Documents

Publication Publication Date Title
WO1994023458A3 (en) X-ray detector for a low dosage scanning beam digital x-ray imaging system
CA2071883A1 (en) Multipath laminography system
US4937458A (en) Electron beam lithography apparatus including a beam blanking device utilizing a reference comparator
JPS5621321A (en) Automatically setting method of focus and exposure coefficient of electron beam exposure apparatus
JPS5489579A (en) Electron ray exposure system
JPS64736A (en) Ion beam device
JPS5322357A (en) Beam blanking unit
JPS5536990A (en) Apparatus for applying electron beam
JPS57210549A (en) Method of correction attendant on deflection
JPS5447472A (en) Picture display unit
JPS52103966A (en) Deflection unit for charged particle ray exposure device
JPS5530259A (en) Information recorder
JPS53113480A (en) Reflecting electron beam detector
JPS54138467A (en) Scanning type electron microscope or resembling apparatus
JPS5582072A (en) Measuring method for emitted electron flow angle distribution for electron gun
JPS5365668A (en) Electron beam exposure device
JPS5448481A (en) Electron ray unit
JP2715507B2 (ja) 電子ビームを用いた基板検査装置
JPS5732557A (en) Scan electron microscope
JPS56136446A (en) Ion injector
JPS54143089A (en) X-ray generator
JPS55160428A (en) Position detecting method for exposed material in electron beam exposure
JPS5318945A (en) Electronic gun for cathode-ray tube
JPS57139924A (en) Drawing device by electron beam
JPS5488064A (en) Picture display unit