JPS64743A - Counter for wafer - Google Patents

Counter for wafer

Info

Publication number
JPS64743A
JPS64743A JP63020958A JP2095888A JPS64743A JP S64743 A JPS64743 A JP S64743A JP 63020958 A JP63020958 A JP 63020958A JP 2095888 A JP2095888 A JP 2095888A JP S64743 A JPS64743 A JP S64743A
Authority
JP
Japan
Prior art keywords
wafer
wafers
guides
positions
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63020958A
Other languages
Japanese (ja)
Other versions
JPH0611070B2 (en
JPH01743A (en
Inventor
Toshihiko Kagami
Kazuyoshi Kobayashi
Eiji Asakawa
Atsushi Osada
Kozo Hara
Yasuji Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP63020958A priority Critical patent/JPH0611070B2/en
Publication of JPS64743A publication Critical patent/JPS64743A/en
Publication of JPH01743A publication Critical patent/JPH01743A/en
Publication of JPH0611070B2 publication Critical patent/JPH0611070B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Controlling Sheets Or Webs (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE: To obtain a wafer counter, which can collectively detect the positions and number of a large number of semiconductor wafers instantaneously by simple structure, at low cost by wafer guides arranged so as to be fitted to the peripheries of each wafer housed and disposed at predetermined intervals, detecting element pairs set up to the wafer guides so as to interrupt an optical path, and a signal processing section detecting the presence of the wafers.
CONSTITUTION: Wafers 22 are inserted among space among adjacent detecting element pairs 26, to which the wafers 22 are arranged to a pectinate shape, by wafer guides 24a, 24b regarding a wafer counter 20 inserted into a wafer cassette 21. Infrared rays are emitted from a light-emitting element, and the presence of the wafers 22 is detected. The positions and number of the wafers 22 are detected finally by a signal processing section at that time, and displayed by a monitor, etc. Consequently, the wafer guide 24b is fitted between wafer guide 24a, 24c rows installed at both ends, thus precisely housing the wafers 22 by the guides without displacement. The wafers housed into the wafer cassette can be detected collectively, thus detecting positions and number in a short time.
COPYRIGHT: (C)1989,JPO&Japio
JP63020958A 1987-02-13 1988-01-29 Wafer counter Expired - Lifetime JPH0611070B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63020958A JPH0611070B2 (en) 1987-02-13 1988-01-29 Wafer counter

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP3104887 1987-02-13
JP62-31048 1987-02-13
JP63020958A JPH0611070B2 (en) 1987-02-13 1988-01-29 Wafer counter

Publications (3)

Publication Number Publication Date
JPS64743A true JPS64743A (en) 1989-01-05
JPH01743A JPH01743A (en) 1989-01-05
JPH0611070B2 JPH0611070B2 (en) 1994-02-09

Family

ID=26357956

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63020958A Expired - Lifetime JPH0611070B2 (en) 1987-02-13 1988-01-29 Wafer counter

Country Status (1)

Country Link
JP (1) JPH0611070B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4711826A (en) * 1986-01-27 1987-12-08 Olin Corporation Iron-nickel alloys having improved glass sealing properties
JPH02305449A (en) * 1989-02-28 1990-12-19 Kokusai Electric Co Ltd Wafer counter
JPH03237739A (en) * 1990-02-15 1991-10-23 Kokusai Electric Co Ltd Wafer counting device
JPH0730207U (en) * 1993-11-04 1995-06-06 大日本スクリーン製造株式会社 Substrate storage state detector
KR100481279B1 (en) * 2002-09-12 2005-04-07 한국디엔에스 주식회사 A wafer boat for a semiconductor device fabrication
JP2006135094A (en) * 2004-11-05 2006-05-25 Toshiba Corp Substrate detector
JP2009238993A (en) * 2008-03-27 2009-10-15 Oki Semiconductor Co Ltd Wafer transfer apparatus
CN115295462A (en) * 2022-07-29 2022-11-04 上海广川科技有限公司 Wafer buffer device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60170869U (en) * 1984-04-17 1985-11-12 東京エレクトロン相模株式会社 wafer counter
JPS61105853A (en) * 1984-10-30 1986-05-23 Anelva Corp Autoloader
JPS61127640U (en) * 1985-01-26 1986-08-11
JPS61153345U (en) * 1985-03-15 1986-09-22
JPS6313344A (en) * 1986-07-03 1988-01-20 Teru Saamuko Kk Wafer counter

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60170869U (en) * 1984-04-17 1985-11-12 東京エレクトロン相模株式会社 wafer counter
JPS61105853A (en) * 1984-10-30 1986-05-23 Anelva Corp Autoloader
JPS61127640U (en) * 1985-01-26 1986-08-11
JPS61153345U (en) * 1985-03-15 1986-09-22
JPS6313344A (en) * 1986-07-03 1988-01-20 Teru Saamuko Kk Wafer counter

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4711826A (en) * 1986-01-27 1987-12-08 Olin Corporation Iron-nickel alloys having improved glass sealing properties
JPH02305449A (en) * 1989-02-28 1990-12-19 Kokusai Electric Co Ltd Wafer counter
JPH03237739A (en) * 1990-02-15 1991-10-23 Kokusai Electric Co Ltd Wafer counting device
JPH0730207U (en) * 1993-11-04 1995-06-06 大日本スクリーン製造株式会社 Substrate storage state detector
KR100481279B1 (en) * 2002-09-12 2005-04-07 한국디엔에스 주식회사 A wafer boat for a semiconductor device fabrication
JP2006135094A (en) * 2004-11-05 2006-05-25 Toshiba Corp Substrate detector
JP2009238993A (en) * 2008-03-27 2009-10-15 Oki Semiconductor Co Ltd Wafer transfer apparatus
CN115295462A (en) * 2022-07-29 2022-11-04 上海广川科技有限公司 Wafer buffer device

Also Published As

Publication number Publication date
JPH0611070B2 (en) 1994-02-09

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