JPS647457B2 - - Google Patents

Info

Publication number
JPS647457B2
JPS647457B2 JP58011753A JP1175383A JPS647457B2 JP S647457 B2 JPS647457 B2 JP S647457B2 JP 58011753 A JP58011753 A JP 58011753A JP 1175383 A JP1175383 A JP 1175383A JP S647457 B2 JPS647457 B2 JP S647457B2
Authority
JP
Japan
Prior art keywords
ion
magnetic field
ions
mass
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58011753A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59138044A (ja
Inventor
Masanori Komuro
Hiroshi Hiroshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58011753A priority Critical patent/JPS59138044A/ja
Publication of JPS59138044A publication Critical patent/JPS59138044A/ja
Publication of JPS647457B2 publication Critical patent/JPS647457B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP58011753A 1983-01-27 1983-01-27 集束イオンビ−ム装置 Granted JPS59138044A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58011753A JPS59138044A (ja) 1983-01-27 1983-01-27 集束イオンビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58011753A JPS59138044A (ja) 1983-01-27 1983-01-27 集束イオンビ−ム装置

Publications (2)

Publication Number Publication Date
JPS59138044A JPS59138044A (ja) 1984-08-08
JPS647457B2 true JPS647457B2 (de) 1989-02-08

Family

ID=11786755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58011753A Granted JPS59138044A (ja) 1983-01-27 1983-01-27 集束イオンビ−ム装置

Country Status (1)

Country Link
JP (1) JPS59138044A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03171838A (ja) * 1989-11-29 1991-07-25 Alpine Electron Inc 自動車電話装置のパワーセーブ方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10339346B8 (de) * 2003-08-25 2006-04-13 Ion-Tof Gmbh Massenspektrometer und Flüssigmetall-Ionenquelle für ein solches Massenspektrometer
JP4431459B2 (ja) 2004-07-29 2010-03-17 株式会社日立ハイテクノロジーズ 集束イオン・ビーム装置及び集束イオン・ビーム照射方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03171838A (ja) * 1989-11-29 1991-07-25 Alpine Electron Inc 自動車電話装置のパワーセーブ方法

Also Published As

Publication number Publication date
JPS59138044A (ja) 1984-08-08

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