JPS6475191A - Laser beam machine - Google Patents

Laser beam machine

Info

Publication number
JPS6475191A
JPS6475191A JP62230767A JP23076787A JPS6475191A JP S6475191 A JPS6475191 A JP S6475191A JP 62230767 A JP62230767 A JP 62230767A JP 23076787 A JP23076787 A JP 23076787A JP S6475191 A JPS6475191 A JP S6475191A
Authority
JP
Japan
Prior art keywords
area
laser beam
light intensity
intensity
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62230767A
Other languages
Japanese (ja)
Inventor
Seiji Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP62230767A priority Critical patent/JPS6475191A/en
Publication of JPS6475191A publication Critical patent/JPS6475191A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B23K26/0661—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks disposed on the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To improve a product in quality and yield by fitting an optical filter to cover part of the front end side of a stopping hole to a field stopping body of a laser optical system and attenuating the intensity of a laser beam. CONSTITUTION:The filter 16 to attenuate the intensity of an incident laser beam by covering part of a stopping hole 6 is provided on the field stopping body 5 in a laser optical system. The shape of an irradiating spot of the laser beam transmitting the field stopping body 5 gives an intensity distribution shown when an area (e) to keep a high light intensity comes in line with an area (f) of a low light intensity attenuated by a filter. Accordingly, a worked surface is scribed sufficiently by a 1st laser beam pulse in the area (e) of high light intensity and is not scribed in the area (f) of low light intensity. The unworked part is worked by a next pulse in the area (e) and uniform working is performed continuously in sequence. Since excessive laser irradiation is prevented, the product is improved in quality and yield.
JP62230767A 1987-09-14 1987-09-14 Laser beam machine Pending JPS6475191A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62230767A JPS6475191A (en) 1987-09-14 1987-09-14 Laser beam machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62230767A JPS6475191A (en) 1987-09-14 1987-09-14 Laser beam machine

Publications (1)

Publication Number Publication Date
JPS6475191A true JPS6475191A (en) 1989-03-20

Family

ID=16912943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62230767A Pending JPS6475191A (en) 1987-09-14 1987-09-14 Laser beam machine

Country Status (1)

Country Link
JP (1) JPS6475191A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004009139A (en) * 2002-06-10 2004-01-15 New Wave Research Method and system for manufacturing a die
JP2011206797A (en) * 2010-03-29 2011-10-20 Hitachi Via Mechanics Ltd Laser machining method and laser machining device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004009139A (en) * 2002-06-10 2004-01-15 New Wave Research Method and system for manufacturing a die
US8822882B2 (en) 2002-06-10 2014-09-02 New Wave Research Scribing sapphire substrates with a solid state UV laser with edge detection
JP2011206797A (en) * 2010-03-29 2011-10-20 Hitachi Via Mechanics Ltd Laser machining method and laser machining device

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