JPS647543A - Flattening material and method for flattening - Google Patents
Flattening material and method for flatteningInfo
- Publication number
- JPS647543A JPS647543A JP3820387A JP3820387A JPS647543A JP S647543 A JPS647543 A JP S647543A JP 3820387 A JP3820387 A JP 3820387A JP 3820387 A JP3820387 A JP 3820387A JP S647543 A JPS647543 A JP S647543A
- Authority
- JP
- Japan
- Prior art keywords
- molecular weight
- macromolecules
- flat surface
- less
- ideal flat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title abstract 3
- 238000000034 method Methods 0.000 title abstract 2
- 229920002521 macromolecule Polymers 0.000 abstract 5
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 239000012530 fluid Substances 0.000 abstract 1
Landscapes
- Local Oxidation Of Silicon (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE:To make it possible to obtain an ideal flat surface having no pattern width dependence by a method wherein a flattening material is made in such a way as to consist of organic macromolecules of a low molecular weight. CONSTITUTION:A film consisting of organic macromolecules of a low molecular weight is used as a flattening material. The fusing viscosity of the macromolecules to be used at 200 deg.C is normally 5000cp or less and if the viscosity exceeds 5000cp, an ideal flat surface having a difference of unevenness of 1000 Angstrom or less becomes hard to be obtained even though the step width of the surface of the film is 50mum or less. Moreover, it is desirable that the molecular weight (weight average molecular weight) of the macromolecules to be used is normally 500-10000 and a molecular weight of 500-8000 is further desirable. If the molecular weight (weight average molecular weight) is less than 500, the macromolecules have a tendency to turn into a fluid even at normal temperatures and the longer the rotating time of a spin at the time of coating takes, the thinner the film thickness becomes to cause trouble in the aspect of controllability of the film thickness. Moreover, if the molecular weight (weight average molecular weight) exceeds 10000, the fusing viscosity at 200 deg.C becomes high and the ideal flat surface becomes hard to be obtained. Thereby, the ideal flat surface having no conductor width dependence can be obtained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62038203A JP2604370B2 (en) | 1986-05-30 | 1987-02-20 | Planarizing material and planarizing method |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12659386 | 1986-05-30 | ||
| JP61-126593 | 1986-05-30 | ||
| JP62038203A JP2604370B2 (en) | 1986-05-30 | 1987-02-20 | Planarizing material and planarizing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS647543A true JPS647543A (en) | 1989-01-11 |
| JP2604370B2 JP2604370B2 (en) | 1997-04-30 |
Family
ID=26377401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62038203A Expired - Fee Related JP2604370B2 (en) | 1986-05-30 | 1987-02-20 | Planarizing material and planarizing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2604370B2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5834945A (en) * | 1981-08-26 | 1983-03-01 | Nippon Telegr & Teleph Corp <Ntt> | Multilayer wiring constitution |
| JPS6037751A (en) * | 1983-08-10 | 1985-02-27 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
-
1987
- 1987-02-20 JP JP62038203A patent/JP2604370B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5834945A (en) * | 1981-08-26 | 1983-03-01 | Nippon Telegr & Teleph Corp <Ntt> | Multilayer wiring constitution |
| JPS6037751A (en) * | 1983-08-10 | 1985-02-27 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2604370B2 (en) | 1997-04-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |