JPS6475676A - Ion implantation device - Google Patents

Ion implantation device

Info

Publication number
JPS6475676A
JPS6475676A JP62233093A JP23309387A JPS6475676A JP S6475676 A JPS6475676 A JP S6475676A JP 62233093 A JP62233093 A JP 62233093A JP 23309387 A JP23309387 A JP 23309387A JP S6475676 A JPS6475676 A JP S6475676A
Authority
JP
Japan
Prior art keywords
target
electromotive force
faraday cage
negative
respect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62233093A
Other languages
Japanese (ja)
Other versions
JP2508131B2 (en
Inventor
Kohei Sekine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP62233093A priority Critical patent/JP2508131B2/en
Publication of JPS6475676A publication Critical patent/JPS6475676A/en
Application granted granted Critical
Publication of JP2508131B2 publication Critical patent/JP2508131B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To eliminate the measurement error by noise by connecting a photoelectric transducer which generates electromotive force by photoirradiation between a Faraday cage and target and maintaining the Faraday cage negative with respect to the target by the generated electromotive force. CONSTITUTION:A light source 12 is lighted by an AC power supply 13 and a solar battery is irradiated by the light thereof so that the electromotive force is generated. This electromotive force is impressed between the Faraday cage 1 and the target 2 to maintain the Faraday cage 1 negative with respect to the target 2. The secondary electrons released from the target 2 are, therefore, returned to the target 2. The ion current from the target 2 flows to a current integrator 3 if a Zener diode 11 is previously connected in parallel with the solar battery 10 so as to be in the direction reverse from the target 2. The insulation is thereby facilitated and the operation for exchanging the battery on account of consumption is eliminated.
JP62233093A 1987-09-16 1987-09-16 Ion implanter Expired - Fee Related JP2508131B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62233093A JP2508131B2 (en) 1987-09-16 1987-09-16 Ion implanter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62233093A JP2508131B2 (en) 1987-09-16 1987-09-16 Ion implanter

Publications (2)

Publication Number Publication Date
JPS6475676A true JPS6475676A (en) 1989-03-22
JP2508131B2 JP2508131B2 (en) 1996-06-19

Family

ID=16949673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62233093A Expired - Fee Related JP2508131B2 (en) 1987-09-16 1987-09-16 Ion implanter

Country Status (1)

Country Link
JP (1) JP2508131B2 (en)

Also Published As

Publication number Publication date
JP2508131B2 (en) 1996-06-19

Similar Documents

Publication Publication Date Title
AU579804B2 (en) Circuit arrangement for feeding an electric load from a solar generator
SE8205797D0 (en) Charging regulator
CH617822B (en) DEVICE FOR CHARGING AN ACCUMULATOR USING PHOTOSENSITIVE ELEMENTS.
DE3375336D1 (en) Apparatus for automatically tracking the optimum working point of a d.c. voltage source
CH622924B (en) CHARGE CONTROL CIRCUIT FOR CONTROLLING THE CHARGING OF A SECONDARY BATTERY IN AN ELECTRONIC DEVICE.
JPS5395253A (en) Ac current control system
JPS5314347A (en) Non-power interruption device
SE8301152L (en) EFFECT CELL MONITORING DEVICE
JPS5711466A (en) Dc/dc converter built-in battery system
JPS5770748A (en) Power source device for automobile
MX150409A (en) IMPROVEMENTS IN AN ELECTRICAL POWER SUPPLY SYSTEM
JPS56101524A (en) Monitoring device for laser energy
JPS5412686A (en) Solid state light emitting device driven by alternating current power source
JPS54158535A (en) Non-contact ignition device
JPS5246429A (en) Direct current high voltage power source
JPS5249028A (en) Exposure control circuit for the camera
DK262684A (en) POSITIVE, ACTIVE MATERIAL FOR ELECTROCHEMICAL GENERATORS WITH LARGE SPECIFIC ENERGY
JPS53845A (en) Power source
JPS5376333A (en) Power supply effective at power failure
JPS5391361A (en) Power supply device
JPS5213641A (en) Power failure detector
JPS5366545A (en) Emergency power source circuit
JPS5357986A (en) Solar battery power source device
JPS641432A (en) Power circuit for clock
JPS5350426A (en) Static ac generator

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees