JPS6475902A - Method for measuring refractive index and film thickness - Google Patents

Method for measuring refractive index and film thickness

Info

Publication number
JPS6475902A
JPS6475902A JP23411887A JP23411887A JPS6475902A JP S6475902 A JPS6475902 A JP S6475902A JP 23411887 A JP23411887 A JP 23411887A JP 23411887 A JP23411887 A JP 23411887A JP S6475902 A JPS6475902 A JP S6475902A
Authority
JP
Japan
Prior art keywords
thin film
refractive index
incident angles
sample
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23411887A
Other languages
English (en)
Inventor
Mitami Kihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP23411887A priority Critical patent/JPS6475902A/ja
Publication of JPS6475902A publication Critical patent/JPS6475902A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP23411887A 1987-09-18 1987-09-18 Method for measuring refractive index and film thickness Pending JPS6475902A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23411887A JPS6475902A (en) 1987-09-18 1987-09-18 Method for measuring refractive index and film thickness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23411887A JPS6475902A (en) 1987-09-18 1987-09-18 Method for measuring refractive index and film thickness

Publications (1)

Publication Number Publication Date
JPS6475902A true JPS6475902A (en) 1989-03-22

Family

ID=16965915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23411887A Pending JPS6475902A (en) 1987-09-18 1987-09-18 Method for measuring refractive index and film thickness

Country Status (1)

Country Link
JP (1) JPS6475902A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19733890C2 (de) * 1996-08-04 2000-03-16 Matsushita Electric Industrial Co Ltd Verfahren zum Vermessen eines Mediums und Vorrichtung dazu
JP2004279296A (ja) * 2003-03-18 2004-10-07 Japan Science & Technology Agency 膜厚取得方法
JP2010197398A (ja) * 2002-09-09 2010-09-09 Zygo Corp 薄膜構造の特性評価を含む、偏光解析、反射光測定および散乱光測定のための干渉計法
JPWO2021014689A1 (ja) * 2019-07-24 2021-01-28
CN113755806A (zh) * 2021-09-10 2021-12-07 四川旭虹光电科技有限公司 反射式磁控溅射镀膜厚度监测装置、镀膜机及方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19733890C2 (de) * 1996-08-04 2000-03-16 Matsushita Electric Industrial Co Ltd Verfahren zum Vermessen eines Mediums und Vorrichtung dazu
US6172752B1 (en) 1996-08-04 2001-01-09 Matsushita Electric Industrial Co., Ltd. Method and apparatus for simultaneously interferometrically measuring optical characteristics in a noncontact manner
JP2010197398A (ja) * 2002-09-09 2010-09-09 Zygo Corp 薄膜構造の特性評価を含む、偏光解析、反射光測定および散乱光測定のための干渉計法
JP2004279296A (ja) * 2003-03-18 2004-10-07 Japan Science & Technology Agency 膜厚取得方法
JPWO2021014689A1 (ja) * 2019-07-24 2021-01-28
WO2021014689A1 (ja) * 2019-07-24 2021-01-28 国立大学法人北海道大学 厚さ測定装置及び方法
CN113755806A (zh) * 2021-09-10 2021-12-07 四川旭虹光电科技有限公司 反射式磁控溅射镀膜厚度监测装置、镀膜机及方法

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