JPS64766A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number: JPS64766A
Authority: JP; Japan
Prior art keywords: hydrogen; fluorine; gas; concentration; polycrystalline silicon
Prior art date: 1987-03-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP6916988A

Other languages

English (en)

Other versions

JPH01766A (ja

Inventor

Shigeru Shirai

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Canon Inc

Original Assignee

Canon Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-03-23

Filing date

1988-03-23

Publication date

1989-01-05

1988-03-23 Application filed by Canon Inc filed Critical Canon Inc

1988-03-23 Priority to JP6916988A priority Critical patent/JPS64766A/ja

1989-01-05 Publication of JPH01766A publication Critical patent/JPH01766A/ja

1989-01-05 Publication of JPS64766A publication Critical patent/JPS64766A/ja

Status Pending legal-status Critical Current

Links

239000004065 semiconductor Substances 0.000 title abstract 4
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 7
239000001257 hydrogen Substances 0.000 abstract 7
229910052739 hydrogen Inorganic materials 0.000 abstract 7
PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 abstract 6
229910052731 fluorine Inorganic materials 0.000 abstract 6
239000011737 fluorine Substances 0.000 abstract 6
239000007789 gas Substances 0.000 abstract 4
229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 3
239000000758 substrate Substances 0.000 abstract 2
239000010409 thin film Substances 0.000 abstract 2
230000015572 biosynthetic process Effects 0.000 abstract 1
238000010438 heat treatment Methods 0.000 abstract 1
238000000034 method Methods 0.000 abstract 1

Landscapes

Thin Film Transistor (AREA)

JP6916988A 1987-03-23 1988-03-23 Semiconductor device Pending JPS64766A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP6916988A JPS64766A (en)	1987-03-23	1988-03-23	Semiconductor device

Applications Claiming Priority (4)

Application Number	Priority Date	Filing Date	Title
JP62-68305		1987-03-23
JP6830587		1987-03-23
JP62-69776		1987-03-24
JP6916988A JPS64766A (en)	1987-03-23	1988-03-23	Semiconductor device

Publications (2)

Publication Number	Publication Date
JPH01766A JPH01766A (ja)	1989-01-05
JPS64766A true JPS64766A (en)	1989-01-05

Family

ID=26409522

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP6916988A Pending JPS64766A (en)	1987-03-23	1988-03-23	Semiconductor device

Country Status (1)

Country	Link
JP (1)	JPS64766A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4992839A (en) *	1987-03-23	1991-02-12	Canon Kabushiki Kaisha	Field effect thin film transistor having a semiconductor layer formed from a polycrystal silicon film containing hydrogen atom and halogen atom and process for the preparation of the same
US7946592B2 (en)	2004-11-02	2011-05-24	Komatsu Corporation	Bearing seal
JP2012019146A (ja) *	2010-07-09	2012-01-26	Sony Corp	撮像装置、表示撮像装置および電子機器

1988
- 1988-03-23 JP JP6916988A patent/JPS64766A/ja active Pending

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4992839A (en) *	1987-03-23	1991-02-12	Canon Kabushiki Kaisha	Field effect thin film transistor having a semiconductor layer formed from a polycrystal silicon film containing hydrogen atom and halogen atom and process for the preparation of the same
US7946592B2 (en)	2004-11-02	2011-05-24	Komatsu Corporation	Bearing seal
JP2012019146A (ja) *	2010-07-09	2012-01-26	Sony Corp	撮像装置、表示撮像装置および電子機器

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