JPS6478122A - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
JPS6478122A
JPS6478122A JP23367687A JP23367687A JPS6478122A JP S6478122 A JPS6478122 A JP S6478122A JP 23367687 A JP23367687 A JP 23367687A JP 23367687 A JP23367687 A JP 23367687A JP S6478122 A JPS6478122 A JP S6478122A
Authority
JP
Japan
Prior art keywords
hall element
stuck
sheet
printed board
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23367687A
Other languages
Japanese (ja)
Other versions
JPH0646171B2 (en
Inventor
Tomonori Katano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP23367687A priority Critical patent/JPH0646171B2/en
Publication of JPS6478122A publication Critical patent/JPS6478122A/en
Publication of JPH0646171B2 publication Critical patent/JPH0646171B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

PURPOSE:To obtain a simple and durable pressure sensor having sufficient performance and reliability for a robot use by detecting a varied magnetic flux density by a Hall element in accordance with a distance between a coil wiring through which a current is flowing and the Hall element opposed thereto. CONSTITUTION:On a silicon plate 14 which has been stuck to a base 15, a Hall element 41 is formed in an array shape by a semiconductor process, and simultaneously, an analog switch, an amplifier, a wiring, etc., for sweeping and fetching an electric signal of the Hall element 141 are also provided. On the silicon plate 14, an elastic material sheet 13 which is made of silicone rubber, etc., excellent in its restoring force, and also, a suitable elastic modulus is stuck. On the sheet 13, a flexible printed board 12 provided with a coil wiring 121 is stuck to a position opposed to the element 141. The printed board 12 is covered with a pressure receiving sheet 11 having a suitable elastic modulus.
JP23367687A 1987-09-19 1987-09-19 Pressure sensor Expired - Lifetime JPH0646171B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23367687A JPH0646171B2 (en) 1987-09-19 1987-09-19 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23367687A JPH0646171B2 (en) 1987-09-19 1987-09-19 Pressure sensor

Publications (2)

Publication Number Publication Date
JPS6478122A true JPS6478122A (en) 1989-03-23
JPH0646171B2 JPH0646171B2 (en) 1994-06-15

Family

ID=16958788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23367687A Expired - Lifetime JPH0646171B2 (en) 1987-09-19 1987-09-19 Pressure sensor

Country Status (1)

Country Link
JP (1) JPH0646171B2 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006266683A (en) * 2005-03-22 2006-10-05 Hitachi Ltd Mechanical quantity measuring device
JP2008523385A (en) * 2004-12-08 2008-07-03 エムディーティー カンパニー リミテッド Variable inductor type MEMS pressure sensor using magnetostrictive effect
JP2011047688A (en) * 2009-08-25 2011-03-10 Konica Minolta Business Technologies Inc Pressure sensing element and pressure sensor
JP2011153826A (en) * 2009-11-20 2011-08-11 B L Auto Tec Kk Tactile sensor
CN103148970A (en) * 2013-02-27 2013-06-12 东南大学 Passive wireless pressure sensor based on flexible substrates
CN103148969A (en) * 2013-02-27 2013-06-12 东南大学 Method for manufacturing flexible-substrate-based self-encapsulation passive wireless pressure sensor
JP2018044941A (en) * 2016-09-13 2018-03-22 日本精工株式会社 Sensing device-equipped wheel
CN114802552A (en) * 2022-02-21 2022-07-29 上海钧正网络科技有限公司 Two-wheeled vehicle
CN114964567A (en) * 2022-06-15 2022-08-30 宁波普瑞均胜汽车电子有限公司 Surface pressure detection system and control method for automobile human-computer interface parts

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8330726B2 (en) 2003-05-19 2012-12-11 Xiroku, Inc. Position detection apparatus using area image sensor
JP3999729B2 (en) * 2003-11-28 2007-10-31 株式会社シロク Pressure detection device using electromagnetic coupling
EP2031346A4 (en) 2006-06-19 2014-07-02 Newcom Inc Object detecting device for detecting an object by electromagnetic induction

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008523385A (en) * 2004-12-08 2008-07-03 エムディーティー カンパニー リミテッド Variable inductor type MEMS pressure sensor using magnetostrictive effect
JP2006266683A (en) * 2005-03-22 2006-10-05 Hitachi Ltd Mechanical quantity measuring device
JP2011047688A (en) * 2009-08-25 2011-03-10 Konica Minolta Business Technologies Inc Pressure sensing element and pressure sensor
JP2011153826A (en) * 2009-11-20 2011-08-11 B L Auto Tec Kk Tactile sensor
CN103148970A (en) * 2013-02-27 2013-06-12 东南大学 Passive wireless pressure sensor based on flexible substrates
CN103148969A (en) * 2013-02-27 2013-06-12 东南大学 Method for manufacturing flexible-substrate-based self-encapsulation passive wireless pressure sensor
JP2018044941A (en) * 2016-09-13 2018-03-22 日本精工株式会社 Sensing device-equipped wheel
CN114802552A (en) * 2022-02-21 2022-07-29 上海钧正网络科技有限公司 Two-wheeled vehicle
CN114802552B (en) * 2022-02-21 2024-08-06 上海钧正网络科技有限公司 Two-wheeled vehicle
CN114964567A (en) * 2022-06-15 2022-08-30 宁波普瑞均胜汽车电子有限公司 Surface pressure detection system and control method for automobile human-computer interface parts

Also Published As

Publication number Publication date
JPH0646171B2 (en) 1994-06-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term