JPS6479096A - Molecular ray cell shutter - Google Patents
Molecular ray cell shutterInfo
- Publication number
- JPS6479096A JPS6479096A JP23803587A JP23803587A JPS6479096A JP S6479096 A JPS6479096 A JP S6479096A JP 23803587 A JP23803587 A JP 23803587A JP 23803587 A JP23803587 A JP 23803587A JP S6479096 A JPS6479096 A JP S6479096A
- Authority
- JP
- Japan
- Prior art keywords
- shutter plate
- shutter
- molecular
- molecular ray
- metals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 abstract 3
- 238000000407 epitaxy Methods 0.000 abstract 2
- 239000007789 gas Substances 0.000 abstract 2
- 229910021397 glassy carbon Inorganic materials 0.000 abstract 2
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 150000002739 metals Chemical class 0.000 abstract 2
- 239000011247 coating layer Substances 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 230000000737 periodic effect Effects 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
PURPOSE:To prevent the reaction with a molecular ray source material and to eliminate the need for the periodic exchange of a shutter plate by using the shutter consisting of a material which is not metals, has heat resistance and releases less gasses in a vacuum as the molecular ray cell shutter for a molecular ray epitaxy device. CONSTITUTION:The shutter plate 1 consisting of the material which is not metals, has heat resistance and releases the less gases in the vacuum is used as the shutter plate 1 of the molecular ray shutter of the molecular ray epitaxy device for growing a thin film crystal by using molecular rays. The adequate embodiment of the shutter plate 1 is exemplified by the shutter plate 1 made of a glassy carbon. The release of the gases from the shutter plate 1 made of the glassy carbon is additionally suppressed by providing a coating layer consisting of PBN on the surface of the shutter plate 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23803587A JPS6479096A (en) | 1987-09-22 | 1987-09-22 | Molecular ray cell shutter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23803587A JPS6479096A (en) | 1987-09-22 | 1987-09-22 | Molecular ray cell shutter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6479096A true JPS6479096A (en) | 1989-03-24 |
Family
ID=17024203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23803587A Pending JPS6479096A (en) | 1987-09-22 | 1987-09-22 | Molecular ray cell shutter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6479096A (en) |
-
1987
- 1987-09-22 JP JP23803587A patent/JPS6479096A/en active Pending
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