JPS6479603A - Scanning tunnel microscope - Google Patents

Scanning tunnel microscope

Info

Publication number
JPS6479603A
JPS6479603A JP62238010A JP23801087A JPS6479603A JP S6479603 A JPS6479603 A JP S6479603A JP 62238010 A JP62238010 A JP 62238010A JP 23801087 A JP23801087 A JP 23801087A JP S6479603 A JPS6479603 A JP S6479603A
Authority
JP
Japan
Prior art keywords
stage
elements
stm
sem
electrostriction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62238010A
Other languages
Japanese (ja)
Other versions
JPH0682042B2 (en
Inventor
Akio Hori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP62238010A priority Critical patent/JPH0682042B2/en
Publication of JPS6479603A publication Critical patent/JPS6479603A/en
Publication of JPH0682042B2 publication Critical patent/JPH0682042B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To obtain a high performance STM image by solving the problem of the damping properties in the combination apparatus of a scanning tunnel microscope STM and a low power microscope SET, by interposing an electrostriction element between the member connected to the objective lens of the SEM and a specimen stand. CONSTITUTION:The base stand 2 of a specimen stand 9 is connected to the frame body 1b of an objective lens 1 and drive mechanisms of X-, Y- and Z-directions are provided to the stage 9. A scanning needle 4 and the support members 6a, 6b of electrostriction elements 5a-5c are connected to the frame body 1b and the electrostriction elements 7, 8 connected to the members 6a, 6b have slight gaps from the stage 9 and, at the time of the observation by an STM, the elements 7, 8 are extended to press the stage 9 to make it possible to stop the movement and vibration of the stage 9. By this constitution, the elements 7, 8 are contracted at the time of the observation by an SEM to make it possible to drive the stage 9 and the surface of a specimen 3 is irradiated with electron beam from the gaps of the elements 5a-5c so as to be scanned thereby. Therefore, the problem of the damping properties in the combination apparatus of the STM and the SEM is solved and a high performances STM image is obtained.
JP62238010A 1987-09-22 1987-09-22 Scanning tunneling microscope Expired - Lifetime JPH0682042B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62238010A JPH0682042B2 (en) 1987-09-22 1987-09-22 Scanning tunneling microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62238010A JPH0682042B2 (en) 1987-09-22 1987-09-22 Scanning tunneling microscope

Publications (2)

Publication Number Publication Date
JPS6479603A true JPS6479603A (en) 1989-03-24
JPH0682042B2 JPH0682042B2 (en) 1994-10-19

Family

ID=17023803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62238010A Expired - Lifetime JPH0682042B2 (en) 1987-09-22 1987-09-22 Scanning tunneling microscope

Country Status (1)

Country Link
JP (1) JPH0682042B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0264401A (en) * 1988-08-31 1990-03-05 Seiko Instr Inc Scanning tunneling microscope
JPH0413904A (en) * 1990-05-08 1992-01-17 Hitachi Ltd scanning tunneling microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0264401A (en) * 1988-08-31 1990-03-05 Seiko Instr Inc Scanning tunneling microscope
JPH0413904A (en) * 1990-05-08 1992-01-17 Hitachi Ltd scanning tunneling microscope
US5256876A (en) * 1990-05-08 1993-10-26 Hitachi Ltd. Scanning tunnel microscope equipped with scanning electron microscope

Also Published As

Publication number Publication date
JPH0682042B2 (en) 1994-10-19

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