JPS64800U - - Google Patents
Info
- Publication number
- JPS64800U JPS64800U JP9635087U JP9635087U JPS64800U JP S64800 U JPS64800 U JP S64800U JP 9635087 U JP9635087 U JP 9635087U JP 9635087 U JP9635087 U JP 9635087U JP S64800 U JPS64800 U JP S64800U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- cylinder
- container valve
- manual container
- manual
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案による特殊ガスボンベの一実施
例を示す図であり、第２図は本考案の他の実施例
を示す図である。
なお、図において、１……容器本体、２……手
動式容器弁、３……容器口、４……空気圧差動弁
、５……手動式容器弁二次側、６……ガス供給吐
出口、７……電動アクチエーター式バルブ、であ
る。
FIG. 1 is a diagram showing one embodiment of a special gas cylinder according to the present invention, and FIG. 2 is a diagram showing another embodiment of the present invention. In the figure, 1... Container body, 2... Manual container valve, 3... Container mouth, 4... Pneumatic differential valve, 5... Manual container valve secondary side, 6... Gas supply discharge. Outlet 7... is an electric actuator type valve.
Claims (1)
式容器弁を取付けたボンベにおいて、前記手動式
容器弁の二次側に動力により動作するしや断弁を
取付けたことを特徴とする特殊ガス用ボンベ。 A cylinder filled with special gas, etc. for semiconductor device manufacturing and equipped with a manual container valve, characterized in that a power-operated stop valve is installed on the secondary side of the manual container valve. cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9635087U JPS64800U (en) | 1987-06-22 | 1987-06-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9635087U JPS64800U (en) | 1987-06-22 | 1987-06-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS64800U true JPS64800U (en) | 1989-01-05 |
Family
ID=30961996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9635087U Pending JPS64800U (en) | 1987-06-22 | 1987-06-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS64800U (en) |
-
1987
- 1987-06-22 JP JP9635087U patent/JPS64800U/ja active Pending