JPS6480909A - Optical device manufacturing device - Google Patents

Optical device manufacturing device

Info

Publication number
JPS6480909A
JPS6480909A JP62237954A JP23795487A JPS6480909A JP S6480909 A JPS6480909 A JP S6480909A JP 62237954 A JP62237954 A JP 62237954A JP 23795487 A JP23795487 A JP 23795487A JP S6480909 A JPS6480909 A JP S6480909A
Authority
JP
Japan
Prior art keywords
laser light
pattern data
scanning
light beam
lithography
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62237954A
Other languages
Japanese (ja)
Other versions
JP2614239B2 (en
Inventor
Takao Shioda
Koichi Inada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optoelectronics Technology Research Laboratory
Original Assignee
Optoelectronics Technology Research Laboratory
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optoelectronics Technology Research Laboratory filed Critical Optoelectronics Technology Research Laboratory
Priority to JP62237954A priority Critical patent/JP2614239B2/en
Publication of JPS6480909A publication Critical patent/JPS6480909A/en
Application granted granted Critical
Publication of JP2614239B2 publication Critical patent/JP2614239B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To facilitate scanning by scanning a laser light beam for lithography and a laser light beam for annealing on a substrate according to common pattern data. CONSTITUTION:The laser light beam for lithography and laser light beam for annealing emitted by a 1st light source 1 and a 2nd light source 2 are supplied selectively to a light converging means 8. Then a control circuit 15 moves the substrate B irradiated with both light beams converged by a converging means 8 respectively in its surface direction according to one pattern data stored in a storage part, and also positions it. Thus, the laser light beams are scanned on the substrate B according to the common pattern data, so pattern data for scanning need not be used individually for the lithography and annealing and the scanning is facilitated.
JP62237954A 1987-09-22 1987-09-22 Optical device manufacturing equipment Expired - Lifetime JP2614239B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62237954A JP2614239B2 (en) 1987-09-22 1987-09-22 Optical device manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62237954A JP2614239B2 (en) 1987-09-22 1987-09-22 Optical device manufacturing equipment

Publications (2)

Publication Number Publication Date
JPS6480909A true JPS6480909A (en) 1989-03-27
JP2614239B2 JP2614239B2 (en) 1997-05-28

Family

ID=17022928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62237954A Expired - Lifetime JP2614239B2 (en) 1987-09-22 1987-09-22 Optical device manufacturing equipment

Country Status (1)

Country Link
JP (1) JP2614239B2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60156014A (en) * 1983-12-27 1985-08-16 Omron Tateisi Electronics Co Production of flush type optical waveguide device
JPS6128940A (en) * 1984-07-20 1986-02-08 Nippon Telegr & Teleph Corp <Ntt> Method and device for forming fine pattern

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60156014A (en) * 1983-12-27 1985-08-16 Omron Tateisi Electronics Co Production of flush type optical waveguide device
JPS6128940A (en) * 1984-07-20 1986-02-08 Nippon Telegr & Teleph Corp <Ntt> Method and device for forming fine pattern

Also Published As

Publication number Publication date
JP2614239B2 (en) 1997-05-28

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