JPS648151A - Conveying device - Google Patents
Conveying deviceInfo
- Publication number
- JPS648151A JPS648151A JP62162837A JP16283787A JPS648151A JP S648151 A JPS648151 A JP S648151A JP 62162837 A JP62162837 A JP 62162837A JP 16283787 A JP16283787 A JP 16283787A JP S648151 A JPS648151 A JP S648151A
- Authority
- JP
- Japan
- Prior art keywords
- moved
- leg parts
- moving elements
- head part
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 abstract 2
- 230000000977 initiatory effect Effects 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H5/00—Feeding articles separated from piles; Feeding articles to machines
- B65H5/008—Feeding articles separated from piles; Feeding articles to machines using vibrations
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Reciprocating Conveyors (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
PURPOSE:To make it possible to use a conveying device suitably for conveying wafers or the like by providing moving elements each having a head moving up and low, and back and forth in association with the vertical motion of a respective leg part, and by vertically driving leg parts with the use of piezoelectric elements. CONSTITUTION:There are provided on a plurality of moving elements 1, 1... each composed of two leg parts A B formed of highly resilient leaf springs 2, a head part C and a base part D, the leg parts A, B being provided with piezoelectric elements as drive means so as to be moved up and down independently. Accordingly, the head part C may be moved by means of the leg parts A, B, depicting a sequence locus through one cycle composed of steps P, Q, R, S, and be returned to its original position before the initiation of the step P. Further, when N-th row of the moving elements and N+1 row of the moving elements constituting a conveying means are moved so that both carry out an identical motion, a wafer U supported on the head part C may be moved in the direction X by one stroke through one cycle of motion during the period starting the step Q and terminating the step R.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62162837A JPS648151A (en) | 1987-06-30 | 1987-06-30 | Conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62162837A JPS648151A (en) | 1987-06-30 | 1987-06-30 | Conveying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS648151A true JPS648151A (en) | 1989-01-12 |
Family
ID=15762188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62162837A Pending JPS648151A (en) | 1987-06-30 | 1987-06-30 | Conveying device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS648151A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008141898A (en) * | 2006-12-05 | 2008-06-19 | Duplo Seiko Corp | Actuator and conveyance device |
-
1987
- 1987-06-30 JP JP62162837A patent/JPS648151A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008141898A (en) * | 2006-12-05 | 2008-06-19 | Duplo Seiko Corp | Actuator and conveyance device |
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