JPS648151A - Conveying device - Google Patents

Conveying device

Info

Publication number
JPS648151A
JPS648151A JP62162837A JP16283787A JPS648151A JP S648151 A JPS648151 A JP S648151A JP 62162837 A JP62162837 A JP 62162837A JP 16283787 A JP16283787 A JP 16283787A JP S648151 A JPS648151 A JP S648151A
Authority
JP
Japan
Prior art keywords
moved
leg parts
moving elements
head part
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62162837A
Other languages
Japanese (ja)
Inventor
Jiro Hida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP62162837A priority Critical patent/JPS648151A/en
Publication of JPS648151A publication Critical patent/JPS648151A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H5/00Feeding articles separated from piles; Feeding articles to machines
    • B65H5/008Feeding articles separated from piles; Feeding articles to machines using vibrations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Reciprocating Conveyors (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To make it possible to use a conveying device suitably for conveying wafers or the like by providing moving elements each having a head moving up and low, and back and forth in association with the vertical motion of a respective leg part, and by vertically driving leg parts with the use of piezoelectric elements. CONSTITUTION:There are provided on a plurality of moving elements 1, 1... each composed of two leg parts A B formed of highly resilient leaf springs 2, a head part C and a base part D, the leg parts A, B being provided with piezoelectric elements as drive means so as to be moved up and down independently. Accordingly, the head part C may be moved by means of the leg parts A, B, depicting a sequence locus through one cycle composed of steps P, Q, R, S, and be returned to its original position before the initiation of the step P. Further, when N-th row of the moving elements and N+1 row of the moving elements constituting a conveying means are moved so that both carry out an identical motion, a wafer U supported on the head part C may be moved in the direction X by one stroke through one cycle of motion during the period starting the step Q and terminating the step R.
JP62162837A 1987-06-30 1987-06-30 Conveying device Pending JPS648151A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62162837A JPS648151A (en) 1987-06-30 1987-06-30 Conveying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62162837A JPS648151A (en) 1987-06-30 1987-06-30 Conveying device

Publications (1)

Publication Number Publication Date
JPS648151A true JPS648151A (en) 1989-01-12

Family

ID=15762188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62162837A Pending JPS648151A (en) 1987-06-30 1987-06-30 Conveying device

Country Status (1)

Country Link
JP (1) JPS648151A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008141898A (en) * 2006-12-05 2008-06-19 Duplo Seiko Corp Actuator and conveyance device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008141898A (en) * 2006-12-05 2008-06-19 Duplo Seiko Corp Actuator and conveyance device

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