JPS6484111A - Calibrating method for accurate angle index - Google Patents

Calibrating method for accurate angle index

Info

Publication number
JPS6484111A
JPS6484111A JP24083887A JP24083887A JPS6484111A JP S6484111 A JPS6484111 A JP S6484111A JP 24083887 A JP24083887 A JP 24083887A JP 24083887 A JP24083887 A JP 24083887A JP S6484111 A JPS6484111 A JP S6484111A
Authority
JP
Japan
Prior art keywords
ray
angle index
locking curve
accurate angle
recorded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24083887A
Other languages
Japanese (ja)
Inventor
Shigeru Yasuami
Koji Usuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP24083887A priority Critical patent/JPS6484111A/en
Publication of JPS6484111A publication Critical patent/JPS6484111A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To shorten a necessary time and to enable high-accuracy calibration by scanning only a part to be calibrated to the width of a locking curve. CONSTITUTION:A continuous X ray 2 emitted by an X-ray source 1 is stopped down through slits 31 and 32 into thin flux, which causes Bragg reflection on monochromators 41 and 42; and a monochromatic X ray 5 is mode incident on Ge crystal 7 mounted on a goniometer 6 where an accurate angle index is fitted. Then, a diffracted X ray 8 is mode incident on a counter 9 and the intensity at respective points of the locking curve is recorded on a recorder 11 through a measuring meter 10. The output of the accurate angle index, on the other hand, is recorded on a recorder 13 through an amplifier 12 and the angles at the respective points of the locking curve are recorded. The recording data of the recorders 11 and 13 are put together to measure the width of the locking curve at an optional angle position of the accurate index. This value is compared with a logical value to obtain an error in the accurate angle index, thereby performing the high-accuracy calibration.
JP24083887A 1987-09-28 1987-09-28 Calibrating method for accurate angle index Pending JPS6484111A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24083887A JPS6484111A (en) 1987-09-28 1987-09-28 Calibrating method for accurate angle index

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24083887A JPS6484111A (en) 1987-09-28 1987-09-28 Calibrating method for accurate angle index

Publications (1)

Publication Number Publication Date
JPS6484111A true JPS6484111A (en) 1989-03-29

Family

ID=17065454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24083887A Pending JPS6484111A (en) 1987-09-28 1987-09-28 Calibrating method for accurate angle index

Country Status (1)

Country Link
JP (1) JPS6484111A (en)

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