JPS6485561A - Linear step driving device - Google Patents

Linear step driving device

Info

Publication number
JPS6485561A
JPS6485561A JP24050687A JP24050687A JPS6485561A JP S6485561 A JPS6485561 A JP S6485561A JP 24050687 A JP24050687 A JP 24050687A JP 24050687 A JP24050687 A JP 24050687A JP S6485561 A JPS6485561 A JP S6485561A
Authority
JP
Japan
Prior art keywords
air
head
contact
movable section
supporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24050687A
Other languages
Japanese (ja)
Inventor
Kenkichi Yamashita
Seiichiro Kimura
Shuzo Hattori
Etsuyuki Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
Original Assignee
NSK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NSK Ltd filed Critical NSK Ltd
Priority to JP24050687A priority Critical patent/JPS6485561A/en
Publication of JPS6485561A publication Critical patent/JPS6485561A/en
Pending legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
  • Linear Motors (AREA)

Abstract

PURPOSE:To make it possible to position with high degree of accuracy and stability and to prevent the generation of frictional heat and abrasion dust by supporting a moving substance of a movable section movably against a fixed substance with non-contact by a non-contact supporting section. CONSTITUTION:A fixed substance 10 is constituted of a base 16 and scales 18 integrally provided to the base 16. V groove 20 is formed on each of scales 18, and the positioning of a movable section 12 and the non-contact supporting are carried out by injecting air as fluid to the groove 20. The movable section 12 is constituted of a loading table 26, a driving head 28 and an air absorption head 30 in the vertical direction. The driving head 28 has an air injection head 36 as a non-contact seizure machine and a piezo-electric element as an actuator. The air absorption head 30 and the air injection head 36 are connected to the air pressure source 15.
JP24050687A 1987-09-25 1987-09-25 Linear step driving device Pending JPS6485561A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24050687A JPS6485561A (en) 1987-09-25 1987-09-25 Linear step driving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24050687A JPS6485561A (en) 1987-09-25 1987-09-25 Linear step driving device

Publications (1)

Publication Number Publication Date
JPS6485561A true JPS6485561A (en) 1989-03-30

Family

ID=17060531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24050687A Pending JPS6485561A (en) 1987-09-25 1987-09-25 Linear step driving device

Country Status (1)

Country Link
JP (1) JPS6485561A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6339266B1 (en) 1998-03-19 2002-01-15 Nikon Corporation Planar motor device, stage unit, exposure apparatus and its making method, and device and its manufacturing method
JP2003288121A (en) * 2002-03-28 2003-10-10 Taiheiyo Cement Corp Positioning control method for fine-movement stage device using piezoelectric actuator, and control device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6339266B1 (en) 1998-03-19 2002-01-15 Nikon Corporation Planar motor device, stage unit, exposure apparatus and its making method, and device and its manufacturing method
JP2003288121A (en) * 2002-03-28 2003-10-10 Taiheiyo Cement Corp Positioning control method for fine-movement stage device using piezoelectric actuator, and control device

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