JPS648619A - Vacuum chuck jig for x-ray mask - Google Patents

Vacuum chuck jig for x-ray mask

Info

Publication number
JPS648619A
JPS648619A JP16447987A JP16447987A JPS648619A JP S648619 A JPS648619 A JP S648619A JP 16447987 A JP16447987 A JP 16447987A JP 16447987 A JP16447987 A JP 16447987A JP S648619 A JPS648619 A JP S648619A
Authority
JP
Japan
Prior art keywords
ray mask
pressure difference
membrane
fixing base
vacuum chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16447987A
Other languages
Japanese (ja)
Inventor
Masahiko Urai
Katsuji Iguchi
Chiyako Shiga
Masayoshi Koba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP16447987A priority Critical patent/JPS648619A/en
Publication of JPS648619A publication Critical patent/JPS648619A/en
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE:To eliminate pressure difference on the front and rear sides of film and fix the X-ray mask through absorption by providing an attracting port to attract an X-ray mask supporting frame, fixing this supporting frame and providing an opening part to the atmospheric air at the lower part of X-ray transmitting film. CONSTITUTION:A groove 1 for vacuum chuck formed on the surface of resist coating disk 5 is provided only to the external frame of wafer (X-ray mask) and the X-ray mask 3 is fixed only with external frame. At the center of rotating disk 5, a hollow region 7 is formed between a membrane 8 and fixing base 5 and pressure difference is generated at the upper and lower portions of membrane 8. A hole 2 is provided at the center of fixing base 5 in order to prevent generation of such pressure difference and thereby the hollow region 7 is connected to the atmospheric air through the hole (pressure difference adjusting hole) 2 formed to the fixing base 5. Thereby, the membrane 8 for X-ray mask can be fixed to the rotating disk 5 without distortion.
JP16447987A 1987-06-30 1987-06-30 Vacuum chuck jig for x-ray mask Pending JPS648619A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16447987A JPS648619A (en) 1987-06-30 1987-06-30 Vacuum chuck jig for x-ray mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16447987A JPS648619A (en) 1987-06-30 1987-06-30 Vacuum chuck jig for x-ray mask

Publications (1)

Publication Number Publication Date
JPS648619A true JPS648619A (en) 1989-01-12

Family

ID=15793955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16447987A Pending JPS648619A (en) 1987-06-30 1987-06-30 Vacuum chuck jig for x-ray mask

Country Status (1)

Country Link
JP (1) JPS648619A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200043074A (en) 2018-10-17 2020-04-27 중앙제어 주식회사 Charging Cable Reel Device
CN111077748A (en) * 2018-10-19 2020-04-28 东芝泰格有限公司 Image forming apparatus and image forming method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200043074A (en) 2018-10-17 2020-04-27 중앙제어 주식회사 Charging Cable Reel Device
CN111077748A (en) * 2018-10-19 2020-04-28 东芝泰格有限公司 Image forming apparatus and image forming method
US20200218186A1 (en) * 2018-10-19 2020-07-09 Toshiba Tec Kabushiki Kaisha Image forming apparatus and image forming method
CN111077748B (en) * 2018-10-19 2024-04-19 东芝泰格有限公司 Image forming apparatus and image forming method

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