JPS6486530A - Prober - Google Patents

Prober

Info

Publication number
JPS6486530A
JPS6486530A JP62242702A JP24270287A JPS6486530A JP S6486530 A JPS6486530 A JP S6486530A JP 62242702 A JP62242702 A JP 62242702A JP 24270287 A JP24270287 A JP 24270287A JP S6486530 A JPS6486530 A JP S6486530A
Authority
JP
Japan
Prior art keywords
chips
gate
positions
values
picture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62242702A
Other languages
Japanese (ja)
Inventor
Kazunori Sakata
Ryozo Hiraga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62242702A priority Critical patent/JPS6486530A/en
Publication of JPS6486530A publication Critical patent/JPS6486530A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Analysis (AREA)

Abstract

PURPOSE:To obtain a prober having the automatic detection function of a probing area for executing a probing test with high reliability in a short time by measuring picture-element density dispersion values at a plurality of positions in a region in which the presence of chips is indistinct, comparing these measured values or these measured values and a specified reference value and deciding the presence of chips at each position. CONSTITUTION:The presence of chips is decided respectively to chip arrays mutually adjacent in the Y direction by using templates T1-T4. That is, the picture-element density dispersion values of gates G1, G2 are measured at the positions of movement by half indices from the centers of mutual chips first. When there are chips at the positions of the gate G1 and the gate G2 respectively at that time, the same or extremely close value is acquired when the results of the measurement of the picture-element density dispersion values of the gate G1 and the template T1 and the gate G2 and the template T2 are compared. When different values are obtained, on the contrary, the absence of chips at the positions of the gates G1, G2 each compared with the templates T1, T2 can be decided.
JP62242702A 1987-09-29 1987-09-29 Prober Pending JPS6486530A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62242702A JPS6486530A (en) 1987-09-29 1987-09-29 Prober

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62242702A JPS6486530A (en) 1987-09-29 1987-09-29 Prober

Publications (1)

Publication Number Publication Date
JPS6486530A true JPS6486530A (en) 1989-03-31

Family

ID=17092976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62242702A Pending JPS6486530A (en) 1987-09-29 1987-09-29 Prober

Country Status (1)

Country Link
JP (1) JPS6486530A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02290036A (en) * 1989-02-13 1990-11-29 Tokyo Electron Ltd Inspection of semiconductor wafer
JPH0384945A (en) * 1989-08-28 1991-04-10 Tokyo Electron Ltd Alignment and inspection apparatus using it
JP2013074242A (en) * 2011-09-29 2013-04-22 Dainippon Screen Mfg Co Ltd Position detecting device, drawing device and position detecting method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02290036A (en) * 1989-02-13 1990-11-29 Tokyo Electron Ltd Inspection of semiconductor wafer
JPH0384945A (en) * 1989-08-28 1991-04-10 Tokyo Electron Ltd Alignment and inspection apparatus using it
JP2013074242A (en) * 2011-09-29 2013-04-22 Dainippon Screen Mfg Co Ltd Position detecting device, drawing device and position detecting method

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