JPS648700U

JPS648700U -

Info

Publication number: JPS648700U
Application number: JP10355587U
Authority: JP
Priority date: 1987-07-06
Filing date: 1987-07-06
Publication date: 1989-01-18

Description

[Brief explanation of the drawing]

第１図はこの考案の一実施例を示す側面図、第
２図ａ，ｂは第１図に示す実施例の部分拡大断面
図である。１……走査管、２……窓枠板、３……押さえ板
、４……貫通孔、５……連結棒、６……コイルス
プリング、７……係止具、８……ピン、９……回
転板、１０……螺旋状溝、１１……回転軸、１２
……電動機、１３……減速機、１４……金属箔。 FIG. 1 is a side view showing an embodiment of this invention, and FIGS. 2a and 2b are partially enlarged sectional views of the embodiment shown in FIG. DESCRIPTION OF SYMBOLS 1... Scanning tube, 2... Window frame plate, 3... Holder plate, 4... Through hole, 5... Connecting rod, 6... Coil spring, 7... Locking tool, 8... Pin, 9 ... Rotating plate, 10 ... Spiral groove, 11 ... Rotating shaft, 12
...Electric motor, 13...Reducer, 14...Metal foil.

Claims

[Scope of utility model registration request]

In an electron beam irradiation device configured to include a scanning tube made of a vacuum container, scan an electron beam in a horizontal direction, and extract the electron beam into the atmosphere through a metal foil forming an irradiation window at the bottom of the scanning tube, A window frame plate extending outside the edge of the irradiation window and surrounding it, a holding plate with a window attached from below with a metal foil sandwiched between the window frame plate, and the window frame plate. a plurality of through holes passing through the holding plate; a connecting rod passing through each of the through holes and having an upper end locked onto the upper surface of the window frame plate and a lower end protruding from the lower surface of the holding plate; and a protruding portion of the connecting rod. A coil spring is inserted into the window frame plate, and a lower end of the coil spring is engaged with a lower end of the connecting rod so that the upper end of the coil spring supports the holding plate with a predetermined interval between the window frame plate and the holding plate. A rotary plate rotatably installed on the upper surface of the window frame board, which has a locking tool for locking the connecting rod, a pin provided perpendicular to the upper end of the connecting rod, and a spiral groove for locking and guiding the pin. and an electric motor for rotating the rotating plate, and rotating the rotating plate in the normal direction to separate the pin from the center of the rotating plate to open a space between the window frame plate and the holding plate, and rotating the rotating plate. A metal foil fixing device for an electron beam irradiation device, characterized in that the holding plate is brought into elastic contact with the window frame plate by rotating the pin in the opposite direction to bring the pin closer to the center of the rotary plate using the coil spring.