JPS6488302A - Position detecting device - Google Patents

Position detecting device

Info

Publication number
JPS6488302A
JPS6488302A JP24858087A JP24858087A JPS6488302A JP S6488302 A JPS6488302 A JP S6488302A JP 24858087 A JP24858087 A JP 24858087A JP 24858087 A JP24858087 A JP 24858087A JP S6488302 A JPS6488302 A JP S6488302A
Authority
JP
Japan
Prior art keywords
light
stage
moving body
slanting
reflecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24858087A
Other languages
Japanese (ja)
Inventor
Junichi Takagi
Kohei Tomita
Hiroaki Takimasa
Maki Yamashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Priority to JP24858087A priority Critical patent/JPS6488302A/en
Publication of JPS6488302A publication Critical patent/JPS6488302A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

PURPOSE:To accurately detect the position of a moving body without prescribing the gap between a detection head and the surface of the moving body strictly by converting light from a light source and projecting laser light with a specific beam diameter on a mirror surface body provided in a specific position of the moving body. CONSTITUTION:This detecting device consists of an optical means 5 which converges the light from the laser diode 11 and projects the light with the specific beam diameter on the stage 1 of a machine tool, the mirror surface body 2 which is provided in the position where the light from the means 5 is projected and has a reflecting slanting surface 2a slanting by an angle theta deg. from the surface of the stage 1, etc. Then when the light beam is projected on the surface of the mirror surface body 2 by the optical means 3 and all reflected by the reflecting slanting surface 2a [A position in figure (a)], constant intense light is obtained and when the light reaches the side part of the reflecting slanting surface 2a (B position), the reflected light level decreases gradually as the stage 1 moves. Therefore, the position of the moving body is detected by a photodiode 18 and a signal processing part 4 according to variation in the reflected light level. Further, the diameter X of the light beam has a little variation, so the gap between the means 3 and stage 3 need not be prescribed strictly.
JP24858087A 1987-09-30 1987-09-30 Position detecting device Pending JPS6488302A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24858087A JPS6488302A (en) 1987-09-30 1987-09-30 Position detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24858087A JPS6488302A (en) 1987-09-30 1987-09-30 Position detecting device

Publications (1)

Publication Number Publication Date
JPS6488302A true JPS6488302A (en) 1989-04-03

Family

ID=17180240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24858087A Pending JPS6488302A (en) 1987-09-30 1987-09-30 Position detecting device

Country Status (1)

Country Link
JP (1) JPS6488302A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013186114A (en) * 2012-03-12 2013-09-19 Mori Seiki Co Ltd Position detection device
JP2016017750A (en) * 2014-07-04 2016-02-01 株式会社Ihi Film thickness measuring device and method
WO2020158677A1 (en) * 2019-01-31 2020-08-06 株式会社メトロール Position detection device
CN114502312A (en) * 2021-03-04 2022-05-13 国立大学法人名古屋工业大学 Laser processing apparatus and relation determination method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57178101A (en) * 1981-04-03 1982-11-02 Philips Nv Detector for position of body
JPS61267018A (en) * 1985-05-21 1986-11-26 Fujitsu Ltd Scanning angle detector
JPS62195504A (en) * 1986-02-24 1987-08-28 Advantest Corp Surface position detecting device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57178101A (en) * 1981-04-03 1982-11-02 Philips Nv Detector for position of body
JPS61267018A (en) * 1985-05-21 1986-11-26 Fujitsu Ltd Scanning angle detector
JPS62195504A (en) * 1986-02-24 1987-08-28 Advantest Corp Surface position detecting device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013186114A (en) * 2012-03-12 2013-09-19 Mori Seiki Co Ltd Position detection device
JP2016017750A (en) * 2014-07-04 2016-02-01 株式会社Ihi Film thickness measuring device and method
WO2020158677A1 (en) * 2019-01-31 2020-08-06 株式会社メトロール Position detection device
CN113316708A (en) * 2019-01-31 2021-08-27 美德龙有限公司 Position detecting device
JPWO2020158677A1 (en) * 2019-01-31 2021-11-11 株式会社メトロール Position detector
EP3913333A4 (en) * 2019-01-31 2022-03-09 Metrol Co., Ltd. POSITION SENSING DEVICE
CN114502312A (en) * 2021-03-04 2022-05-13 国立大学法人名古屋工业大学 Laser processing apparatus and relation determination method
WO2022185472A1 (en) * 2021-03-04 2022-09-09 国立大学法人名古屋工業大学 Laser machining device and relationship determination method
JP7144110B1 (en) * 2021-03-04 2022-09-29 国立大学法人 名古屋工業大学 Laser processing device and relationship determination method

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