JPS6488314A - Optical encoder - Google Patents

Optical encoder

Info

Publication number
JPS6488314A
JPS6488314A JP24672787A JP24672787A JPS6488314A JP S6488314 A JPS6488314 A JP S6488314A JP 24672787 A JP24672787 A JP 24672787A JP 24672787 A JP24672787 A JP 24672787A JP S6488314 A JPS6488314 A JP S6488314A
Authority
JP
Japan
Prior art keywords
scale
grating
light
varies
diffracted light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24672787A
Other languages
Japanese (ja)
Other versions
JPH05646B2 (en
Inventor
Keiji Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Okuma Corp
Original Assignee
Okuma Machinery Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Okuma Machinery Works Ltd filed Critical Okuma Machinery Works Ltd
Priority to JP24672787A priority Critical patent/JPS6488314A/en
Priority to GB8823120A priority patent/GB2210525B/en
Priority to US07/251,089 priority patent/US4950891A/en
Priority to DE3844704A priority patent/DE3844704C2/de
Priority to DE3844705A priority patent/DE3844705C2/de
Priority to DE3833115A priority patent/DE3833115A1/en
Publication of JPS6488314A publication Critical patent/JPS6488314A/en
Priority to US07/374,918 priority patent/US4948968A/en
Priority to US07/374,922 priority patent/US4956553A/en
Publication of JPH05646B2 publication Critical patent/JPH05646B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

PURPOSE:To improve position detection resolution and to decrease absolute position detection stroke length by providing a scale diffracting parallel light projected by a light source device provided with a grating track which is equal in the ratio of light shield parts and nonshield parts and different in pitch. CONSTITUTION:The scale 204 is provided with the grating track TB which varies in grating pitch smoothly within grating pitch Lab [PB, PC, PD... in order from a point (f) to a point (j)]. A condenser lens 205 which converges plural diffracted light beams LG diffracted by the track TB and a light spot position detecting element 206 which detects the position of the light spots of the respective diffracted light beams LH and converts them into electric signals are arranged. Consequently, the angle thetan of diffraction of each diffracted light beam LH incident on the element 206 varies periodically as the grating pitch at the time of CD-directional movement of the scale 204 varies and the light spot position of each diffracted light beam LH converged on the element 206 varies according to said variation. This grating pitch is varied optionally and the scale position is detected from the distance d1 between optional positive and negative diffracted light beams of the same order (e.g. LH+1 and LH-1).
JP24672787A 1987-09-30 1987-09-30 Optical encoder Granted JPS6488314A (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP24672787A JPS6488314A (en) 1987-09-30 1987-09-30 Optical encoder
GB8823120A GB2210525B (en) 1987-09-30 1988-09-29 Optical encoder
US07/251,089 US4950891A (en) 1987-09-30 1988-09-29 High resolution optical encoder having a long detection stroke
DE3844704A DE3844704C2 (en) 1987-09-30 1988-09-29
DE3844705A DE3844705C2 (en) 1987-09-30 1988-09-29
DE3833115A DE3833115A1 (en) 1987-09-30 1988-09-29 OPTICAL CODER
US07/374,918 US4948968A (en) 1987-09-30 1989-07-03 High resolution optical encoder having a long detection stroke
US07/374,922 US4956553A (en) 1987-09-30 1989-07-03 Optical encoder with varying grating pitch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24672787A JPS6488314A (en) 1987-09-30 1987-09-30 Optical encoder

Publications (2)

Publication Number Publication Date
JPS6488314A true JPS6488314A (en) 1989-04-03
JPH05646B2 JPH05646B2 (en) 1993-01-06

Family

ID=17152747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24672787A Granted JPS6488314A (en) 1987-09-30 1987-09-30 Optical encoder

Country Status (1)

Country Link
JP (1) JPS6488314A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5652426A (en) * 1993-04-19 1997-07-29 Ricoh Company, Ltd. Optical encoder having high resolution

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5652426A (en) * 1993-04-19 1997-07-29 Ricoh Company, Ltd. Optical encoder having high resolution

Also Published As

Publication number Publication date
JPH05646B2 (en) 1993-01-06

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