JPS6489254A - Ion beam device - Google Patents

Ion beam device

Info

Publication number
JPS6489254A
JPS6489254A JP62247226A JP24722687A JPS6489254A JP S6489254 A JPS6489254 A JP S6489254A JP 62247226 A JP62247226 A JP 62247226A JP 24722687 A JP24722687 A JP 24722687A JP S6489254 A JPS6489254 A JP S6489254A
Authority
JP
Japan
Prior art keywords
power supply
ion
drawout
signal
ion beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62247226A
Other languages
Japanese (ja)
Inventor
Takeshi Arisawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP62247226A priority Critical patent/JPS6489254A/en
Publication of JPS6489254A publication Critical patent/JPS6489254A/en
Pending legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To stabilize the beam current by boosting the impression voltage on an ion drawout electrode in synchronization with blanking action which is to interrupt intermittently the ion beam irradiation onto a specimen during drawing with ion beam, and enlarging the ion current drawn out. CONSTITUTION:A synch. signal generator 12 emits a control signal Sext in synchronization with blanking action of device and puts a signal passage controller 13 in operation, and therefrom a power supply changeover signal is given to a drawout power supply 5. The drawout power supply 5 is equipped with a high voltage power supply and a low voltage power supply, among which the low voltage power supply is used in normal drawing with ion beam, and this power supply which has been connected with a drawout electrode 2, is switched over to the high voltage power supply when a power supply switching signal is given from the signal passage controller 13 is emitted at the time of blanking. Therefore, high voltage is impressed between the ion drawout electrode 2 and a needle 1, and the ion current drawn out increases uncontinuously to sputter impurities deposited on the tip of the needle. This facilitates stabilization of the beam current.
JP62247226A 1987-09-30 1987-09-30 Ion beam device Pending JPS6489254A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62247226A JPS6489254A (en) 1987-09-30 1987-09-30 Ion beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62247226A JPS6489254A (en) 1987-09-30 1987-09-30 Ion beam device

Publications (1)

Publication Number Publication Date
JPS6489254A true JPS6489254A (en) 1989-04-03

Family

ID=17160330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62247226A Pending JPS6489254A (en) 1987-09-30 1987-09-30 Ion beam device

Country Status (1)

Country Link
JP (1) JPS6489254A (en)

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