JPS6491002A - Three-dimensional scanning microscope - Google Patents

Three-dimensional scanning microscope

Info

Publication number
JPS6491002A
JPS6491002A JP24917487A JP24917487A JPS6491002A JP S6491002 A JPS6491002 A JP S6491002A JP 24917487 A JP24917487 A JP 24917487A JP 24917487 A JP24917487 A JP 24917487A JP S6491002 A JPS6491002 A JP S6491002A
Authority
JP
Japan
Prior art keywords
range
configuration
sensor
displaced
contact type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24917487A
Other languages
Japanese (ja)
Inventor
Naotake Otsuka
Masaaki Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chiyoda Corp
Original Assignee
Chiyoda Chemical Engineering and Construction Co Ltd
Chiyoda Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chiyoda Chemical Engineering and Construction Co Ltd, Chiyoda Corp filed Critical Chiyoda Chemical Engineering and Construction Co Ltd
Priority to JP24917487A priority Critical patent/JPS6491002A/en
Publication of JPS6491002A publication Critical patent/JPS6491002A/en
Pending legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

PURPOSE:To observe the configuration of a ruptured surface directly and to obtain the numerical value of the configuration, by providing a non-contact type range finder so that the range fiber can be displaced in the directions of X and Y with respect to the ruptured surface of a metal, and processing images by using position signals and range signals. CONSTITUTION:A non-contact type range finder sensor 3 is provided so that it can be displaced in the direction X and in the direction Y along a movable rail 4 and a fixed rail 5. The position signals of the range sensor 3 at the time of movement are detected with encoders, which are attached to the rails 4 and 5, and inputted into a control device 6. A range signal (d) from the range sensor 3 is supplied to a display device 9 and an output device 7. The signal is processed into variable density images based on, e.g., the magnitude of the range through the control device 6. Three-dimensional images are displayed on the display device 9. The data are stored in a recording device 8 as digital data through the output device 7. Therefore, the three-dimensional configuration can be directly observed, and the numerical values can be obtained.
JP24917487A 1987-10-02 1987-10-02 Three-dimensional scanning microscope Pending JPS6491002A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24917487A JPS6491002A (en) 1987-10-02 1987-10-02 Three-dimensional scanning microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24917487A JPS6491002A (en) 1987-10-02 1987-10-02 Three-dimensional scanning microscope

Publications (1)

Publication Number Publication Date
JPS6491002A true JPS6491002A (en) 1989-04-10

Family

ID=17189008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24917487A Pending JPS6491002A (en) 1987-10-02 1987-10-02 Three-dimensional scanning microscope

Country Status (1)

Country Link
JP (1) JPS6491002A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11101625A (en) * 1997-09-25 1999-04-13 Mitsubishi Heavy Ind Ltd Fracture surface analysis method by spatial frequency analysis
JP2006242701A (en) * 2005-03-02 2006-09-14 Mie Univ Method and apparatus for inspecting material containing magnetic material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11101625A (en) * 1997-09-25 1999-04-13 Mitsubishi Heavy Ind Ltd Fracture surface analysis method by spatial frequency analysis
JP2006242701A (en) * 2005-03-02 2006-09-14 Mie Univ Method and apparatus for inspecting material containing magnetic material

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