JPS649400A - Soft x-ray outlet window - Google Patents

Soft x-ray outlet window

Info

Publication number
JPS649400A
JPS649400A JP16570887A JP16570887A JPS649400A JP S649400 A JPS649400 A JP S649400A JP 16570887 A JP16570887 A JP 16570887A JP 16570887 A JP16570887 A JP 16570887A JP S649400 A JPS649400 A JP S649400A
Authority
JP
Japan
Prior art keywords
ray
tightly
soft
pressing plate
fixing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16570887A
Other languages
Japanese (ja)
Inventor
Hidekazu Nomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP16570887A priority Critical patent/JPS649400A/en
Publication of JPS649400A publication Critical patent/JPS649400A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Radiation (AREA)
  • X-Ray Techniques (AREA)

Abstract

PURPOSE:To tightly perform junction without degradation of mechanical strength of permeation materials by applying flat and smooth facing up surfaces with small area and a medium for vacuum seal with elasticity, inserting an X-ray permeation material and fixing it firmly and tightly. CONSTITUTION:On the surface of a stainless steel made flange 1 an annular protrusion 5 such as 2.5 wide X 2.5 high is integrally formed on the surface of a center circular opening 4. A circular center circle part of this annular upper surface is good flatness and is flatly and smoothly finished, and taps 6 for fixing and jointing a pressing plate 9 are provided. On the side surface of the annular protrusion 5 a fluorine contained rubber made O ring 7 is inserted, a metal beryllium foil 7 of vacuum tightness of approximately 35mum thick is put thereon and sandwiched by the pressing plate 9. Therefore, a soft X-ray window of high reliability of tight joint with a window frame can be obtained without thin X-ray permeation material.
JP16570887A 1987-07-01 1987-07-01 Soft x-ray outlet window Pending JPS649400A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16570887A JPS649400A (en) 1987-07-01 1987-07-01 Soft x-ray outlet window

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16570887A JPS649400A (en) 1987-07-01 1987-07-01 Soft x-ray outlet window

Publications (1)

Publication Number Publication Date
JPS649400A true JPS649400A (en) 1989-01-12

Family

ID=15817545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16570887A Pending JPS649400A (en) 1987-07-01 1987-07-01 Soft x-ray outlet window

Country Status (1)

Country Link
JP (1) JPS649400A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5159621A (en) * 1990-08-01 1992-10-27 Canon Kabushiki Kaisha X-ray transmitting window and method of mounting the same
DE4301146A1 (en) * 1992-01-17 1993-07-22 Mitsubishi Electric Corp

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5020240U (en) * 1973-06-18 1975-03-07
JPS6013300A (en) * 1983-07-04 1985-01-23 株式会社トーキン Window for electron ray

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5020240U (en) * 1973-06-18 1975-03-07
JPS6013300A (en) * 1983-07-04 1985-01-23 株式会社トーキン Window for electron ray

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5159621A (en) * 1990-08-01 1992-10-27 Canon Kabushiki Kaisha X-ray transmitting window and method of mounting the same
DE4301146A1 (en) * 1992-01-17 1993-07-22 Mitsubishi Electric Corp
US5317618A (en) * 1992-01-17 1994-05-31 Mitsubishi Denki Kabushiki Kaisha Light transmission type vacuum separating window and soft X-ray transmitting window
DE4301146C2 (en) * 1992-01-17 1998-01-29 Mitsubishi Electric Corp Radiation transmission vacuum separation window and its use

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