JPWO2024252987A5 - - Google Patents
Info
- Publication number
- JPWO2024252987A5 JPWO2024252987A5 JP2025526064A JP2025526064A JPWO2024252987A5 JP WO2024252987 A5 JPWO2024252987 A5 JP WO2024252987A5 JP 2025526064 A JP2025526064 A JP 2025526064A JP 2025526064 A JP2025526064 A JP 2025526064A JP WO2024252987 A5 JPWO2024252987 A5 JP WO2024252987A5
- Authority
- JP
- Japan
- Prior art keywords
- holding
- tool
- replacement tool
- unit
- processing tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023093928 | 2023-06-07 | ||
| JP2024075317 | 2024-05-07 | ||
| PCT/JP2024/019560 WO2024252987A1 (fr) | 2023-06-07 | 2024-05-28 | Dispositif de traitement de substrat, procédé de remplacement d'outil de traitement et outil de remplacement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2024252987A1 JPWO2024252987A1 (fr) | 2024-12-12 |
| JPWO2024252987A5 true JPWO2024252987A5 (fr) | 2026-02-25 |
Family
ID=93795974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025526064A Pending JPWO2024252987A1 (fr) | 2023-06-07 | 2024-05-28 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2024252987A1 (fr) |
| KR (1) | KR20260020959A (fr) |
| CN (1) | CN121219821A (fr) |
| TW (1) | TW202505596A (fr) |
| WO (1) | WO2024252987A1 (fr) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3578193B2 (ja) * | 1997-02-07 | 2004-10-20 | 大日本スクリーン製造株式会社 | 基板洗浄装置 |
| JPH10256206A (ja) * | 1997-03-11 | 1998-09-25 | Dainippon Screen Mfg Co Ltd | 洗浄具及び基板洗浄方法並びに基板洗浄装置 |
| JP7478639B2 (ja) | 2020-10-02 | 2024-05-07 | 東京エレクトロン株式会社 | ノズルの位置調整方法及び液処理装置 |
| JP7555290B2 (ja) * | 2021-03-17 | 2024-09-24 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置および処理具交換方法 |
-
2024
- 2024-05-28 KR KR1020257043066A patent/KR20260020959A/ko active Pending
- 2024-05-28 JP JP2025526064A patent/JPWO2024252987A1/ja active Pending
- 2024-05-28 WO PCT/JP2024/019560 patent/WO2024252987A1/fr not_active Ceased
- 2024-05-28 CN CN202480036126.6A patent/CN121219821A/zh active Pending
- 2024-06-06 TW TW113120940A patent/TW202505596A/zh unknown
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