KR20000062361A - 광 섬유용 다공질 유리 모재의 제조방법 - Google Patents
광 섬유용 다공질 유리 모재의 제조방법 Download PDFInfo
- Publication number
- KR20000062361A KR20000062361A KR1019997005851A KR19997005851A KR20000062361A KR 20000062361 A KR20000062361 A KR 20000062361A KR 1019997005851 A KR1019997005851 A KR 1019997005851A KR 19997005851 A KR19997005851 A KR 19997005851A KR 20000062361 A KR20000062361 A KR 20000062361A
- Authority
- KR
- South Korea
- Prior art keywords
- glass
- burner
- base material
- glass fine
- porous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/0144—Means for after-treatment or catching of worked reactant gases
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/06—Concentric circular ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
- C03B2207/22—Inert gas details
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/46—Comprising performance enhancing means, e.g. electrostatic charge or built-in heater
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/50—Multiple burner arrangements
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Glass Melting And Manufacturing (AREA)
Abstract
Description
Claims (5)
- 기체인 유리 원료와 연소용 가스를 함유하는 혼합 가스를 유리 미립자 합성용 버너로부터 분출시켜 형성된 화염 속에서 유리 원료를 화염 가수분해 반응 및/또는 산화 반응시킴으로써 생성되는 유리 미립자를 회전하는 출발재 또는 중심봉의 주위에 퇴적시켜 광섬유용 다공질 모재를 제조하는 방법에 있어서,유리 미립자 합성용 버너 속에서 불활성 가스를 풍속 25m/s 이상으로 유동시킨 후에 유리 미립자의 퇴적을 개시함을 특징으로 하는 광섬유용 다공질 유리 모재의 제조방법.
- 제1항에 있어서, 불활성 가스가 대기압 이상으로 가압되는 것을 특징으로 하는 광섬유용 다공질 유리 모재의 제조방법.
- 제2항에 있어서, 불활성 가스의 가압이 유리 미립자 합성용 버너에 접속된 가압기를 사용하는 것을 특징으로 하는 광섬유용 다공질 유리 모재의 제조방법.
- 제1항에 있어서, 유리 미립자 합성용 버너 속에서의 불활성 가스의 풍속을 25 내지 50m/s로 하는 것을 특징으로 하는 광섬유용 다공질 유리 모재의 제조방법.
- 제1항에 있어서, 유리 미립자 합성용 버너와 배기관이 머플에 설치되고, 배기관 속을 0.lkPa 정도 또는 그 이상으로 감압하는 것을 특징으로 하는 광섬유용 다공질 유리 모재의 제조방법.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP98-045346 | 1998-02-26 | ||
| JP04534698A JP3551006B2 (ja) | 1998-02-26 | 1998-02-26 | 光ファイバ用多孔質母材の製造方法 |
| PCT/JP1998/005600 WO1999043625A1 (fr) | 1998-02-26 | 1998-12-10 | Procede de production d'une matiere premiere de verre poreux destinee a des fibres optiques |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20000062361A true KR20000062361A (ko) | 2000-10-25 |
| KR100538668B1 KR100538668B1 (ko) | 2005-12-26 |
Family
ID=12716732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR10-1999-7005851A Expired - Fee Related KR100538668B1 (ko) | 1998-02-26 | 1998-12-10 | 광 섬유용 다공질 유리 모재의 제조방법 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6449986B2 (ko) |
| JP (1) | JP3551006B2 (ko) |
| KR (1) | KR100538668B1 (ko) |
| CN (1) | CN1123544C (ko) |
| AU (1) | AU739089B2 (ko) |
| GB (1) | GB2339777B (ko) |
| TW (1) | TW512135B (ko) |
| WO (1) | WO1999043625A1 (ko) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7797966B2 (en) * | 2000-12-29 | 2010-09-21 | Single Crystal Technologies, Inc. | Hot substrate deposition of fused silica |
| WO2002102724A1 (fr) * | 2001-06-15 | 2002-12-27 | Sumitomo Electric Industries, Ltd. | Procede de production d'un corps de particules de verre deposees |
| JP2003226543A (ja) * | 2002-02-01 | 2003-08-12 | Fujikura Ltd | 光ファイバ母材の製造方法およびこれを用いた光ファイバ母材製造用バーナ装置 |
| KR100921313B1 (ko) * | 2003-04-08 | 2009-10-13 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 광파이버 모재 제조 장치의 상부 밀봉 구조 및 상부 밀봉방법 |
| KR100651453B1 (ko) | 2005-10-21 | 2006-11-29 | 삼성전자주식회사 | 수트 모재의 제조 장치 |
| JP5655418B2 (ja) * | 2010-08-03 | 2015-01-21 | 住友電気工業株式会社 | 多孔質ガラス母材の製造方法および製造装置 |
| JP6006185B2 (ja) * | 2012-09-24 | 2016-10-12 | 信越化学工業株式会社 | 光ファイバ用多孔質ガラス堆積体の製造方法 |
| JP7170555B2 (ja) | 2019-02-12 | 2022-11-14 | 信越化学工業株式会社 | 光ファイバ用多孔質ガラス母材の製造方法 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4303386A (en) * | 1979-05-18 | 1981-12-01 | Coen Company, Inc. | Parallel flow burner |
| JPS62162642A (ja) | 1986-01-14 | 1987-07-18 | Sumitomo Electric Ind Ltd | 光フアイバ用多孔質母材の製造方法 |
| JPS62166624U (ko) * | 1986-04-14 | 1987-10-22 | ||
| JPS63123831A (ja) | 1986-11-10 | 1988-05-27 | Sumitomo Electric Ind Ltd | 光フアイバ用母材の製造方法 |
| JPS6381828U (ko) * | 1986-11-19 | 1988-05-30 | ||
| JP2873080B2 (ja) * | 1990-11-08 | 1999-03-24 | 株式会社フジクラ | 光ファイバ用ガラス母材の製造装置 |
| US5578130A (en) * | 1990-12-12 | 1996-11-26 | Semiconductor Energy Laboratory Co., Ltd. | Apparatus and method for depositing a film |
| JP3154768B2 (ja) | 1991-10-29 | 2001-04-09 | 信越化学工業株式会社 | 光ファイバ用プリフォーム母材の製造方法 |
| JP3169409B2 (ja) | 1991-12-18 | 2001-05-28 | 信越化学工業株式会社 | 光ファイバ用母材の製造方法 |
| JP2803510B2 (ja) * | 1993-02-10 | 1998-09-24 | 住友電気工業株式会社 | 光ファイバ用ガラス母材の製造方法および装置 |
| US5291841A (en) * | 1993-03-08 | 1994-03-08 | Dykema Owen W | Coal combustion process for SOx and NOx control |
| US5567141A (en) * | 1994-12-30 | 1996-10-22 | Combustion Tec, Inc. | Oxy-liquid fuel combustion process and apparatus |
| DE69622277T2 (de) * | 1995-09-18 | 2003-03-27 | Hitachi, Ltd. | Halbleitermaterial, verfahren zur herstellung des halbleitermaterials und eine halbleitervorrichtung |
| JP3196629B2 (ja) * | 1996-01-08 | 2001-08-06 | 信越化学工業株式会社 | シリカガラスの製造方法及び製造装置 |
| US6164956A (en) * | 1997-02-11 | 2000-12-26 | Ge Energy & Environmental Research Corporation | System and method for removing ash deposits in a combustion device |
| US5979185A (en) * | 1997-07-16 | 1999-11-09 | Corning Incorporated | Method and apparatus for forming silica by combustion of liquid reactants using a heater |
| JP3344694B2 (ja) * | 1997-07-24 | 2002-11-11 | 株式会社日立製作所 | 微粉炭燃焼バーナ |
| US6094940A (en) * | 1997-10-09 | 2000-08-01 | Nikon Corporation | Manufacturing method of synthetic silica glass |
| US6176894B1 (en) * | 1998-06-17 | 2001-01-23 | Praxair Technology, Inc. | Supersonic coherent gas jet for providing gas into a liquid |
| US6367288B1 (en) * | 1999-12-29 | 2002-04-09 | Corning Incorporated | Method and apparatus for preventing burner-hole build-up in fused silica processes |
-
1998
- 1998-02-26 JP JP04534698A patent/JP3551006B2/ja not_active Expired - Fee Related
- 1998-12-10 CN CN98813356A patent/CN1123544C/zh not_active Expired - Fee Related
- 1998-12-10 US US09/423,237 patent/US6449986B2/en not_active Expired - Lifetime
- 1998-12-10 KR KR10-1999-7005851A patent/KR100538668B1/ko not_active Expired - Fee Related
- 1998-12-10 GB GB9925100A patent/GB2339777B/en not_active Expired - Fee Related
- 1998-12-10 AU AU15058/99A patent/AU739089B2/en not_active Ceased
- 1998-12-10 WO PCT/JP1998/005600 patent/WO1999043625A1/ja not_active Ceased
-
1999
- 1999-01-21 TW TW088100912A patent/TW512135B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR100538668B1 (ko) | 2005-12-26 |
| GB2339777A (en) | 2000-02-09 |
| CN1123544C (zh) | 2003-10-08 |
| AU1505899A (en) | 1999-09-15 |
| AU739089B2 (en) | 2001-10-04 |
| GB9925100D0 (en) | 1999-12-22 |
| JPH11240732A (ja) | 1999-09-07 |
| JP3551006B2 (ja) | 2004-08-04 |
| US20010047666A1 (en) | 2001-12-06 |
| US6449986B2 (en) | 2002-09-17 |
| TW512135B (en) | 2002-12-01 |
| WO1999043625A1 (fr) | 1999-09-02 |
| CN1284050A (zh) | 2001-02-14 |
| GB2339777B (en) | 2001-09-12 |
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