KR20140140623A - 흐름 제어 시스템 및 그 방법 - Google Patents

흐름 제어 시스템 및 그 방법 Download PDF

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Publication number
KR20140140623A
KR20140140623A KR1020147030309A KR20147030309A KR20140140623A KR 20140140623 A KR20140140623 A KR 20140140623A KR 1020147030309 A KR1020147030309 A KR 1020147030309A KR 20147030309 A KR20147030309 A KR 20147030309A KR 20140140623 A KR20140140623 A KR 20140140623A
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KR
South Korea
Prior art keywords
pressure
control valve
flow
liquid
controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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KR1020147030309A
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English (en)
Korean (ko)
Inventor
지안 왕
유 자오
리앙지 씨에
씨아오얀 장
세나 지아
후에이 왕
Original Assignee
에이씨엠 리서치 (상하이) 인코포레이티드
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Publication of KR20140140623A publication Critical patent/KR20140140623A/ko
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0664—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a plurality of diverging flows from a single flow

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
KR1020147030309A 2012-03-30 2012-03-30 흐름 제어 시스템 및 그 방법 Ceased KR20140140623A (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2012/073302 WO2013143116A1 (fr) 2012-03-30 2012-03-30 Système de commande d'écoulement et son procédé

Publications (1)

Publication Number Publication Date
KR20140140623A true KR20140140623A (ko) 2014-12-09

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ID=49258104

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KR1020147030309A Ceased KR20140140623A (ko) 2012-03-30 2012-03-30 흐름 제어 시스템 및 그 방법

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KR (1) KR20140140623A (fr)
WO (1) WO2013143116A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104765384A (zh) * 2015-02-10 2015-07-08 柳州市金旭节能科技有限公司 一种液体流量监测装置
CN106708114B (zh) * 2017-03-10 2021-06-11 太原市太航压力测试科技有限公司 一种实现压力精确控制的方法
CN119194418B (zh) * 2024-11-06 2025-03-21 苏州中科重仪半导体材料有限公司 一种控制mocvd设备内外腔流量比的方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4705067A (en) * 1986-05-13 1987-11-10 Coffee Curtis L Electric-to-pressure transducer
JP2003280745A (ja) * 2002-03-25 2003-10-02 Stec Inc マスフローコントローラ
CN101583916B (zh) * 2006-10-03 2011-11-09 株式会社堀场Stec 质量流量控制器

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Publication number Publication date
WO2013143116A1 (fr) 2013-10-03

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