KR20170091020A - 압전 액추에이터 - Google Patents

압전 액추에이터 Download PDF

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Publication number
KR20170091020A
KR20170091020A KR1020170009588A KR20170009588A KR20170091020A KR 20170091020 A KR20170091020 A KR 20170091020A KR 1020170009588 A KR1020170009588 A KR 1020170009588A KR 20170009588 A KR20170009588 A KR 20170009588A KR 20170091020 A KR20170091020 A KR 20170091020A
Authority
KR
South Korea
Prior art keywords
plate
gas
suspension plate
suspension
piezoelectric actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020170009588A
Other languages
English (en)
Korean (ko)
Inventor
신-창 첸
치-펭 후앙
영-룽 한
지아-유 리오
슈-훙 첸
체-웨이 후앙
훙-신 리오
차오-치 첸
젱-웨이 첸
잉-룬 창
치아-하우 창
웨이-밍 리
Original Assignee
마이크로제트 테크놀로지 컴파니 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from TW105128579A external-priority patent/TWI690656B/zh
Application filed by 마이크로제트 테크놀로지 컴파니 리미티드 filed Critical 마이크로제트 테크놀로지 컴파니 리미티드
Publication of KR20170091020A publication Critical patent/KR20170091020A/ko
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H01L41/09—
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • H01L41/23—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/02—Forming enclosures or casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Reciprocating Pumps (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
KR1020170009588A 2016-01-29 2017-01-20 압전 액추에이터 Ceased KR20170091020A (ko)

Applications Claiming Priority (14)

Application Number Priority Date Filing Date Title
TW105102845 2016-01-29
TW105102843 2016-01-29
TW105102842 2016-01-29
TW105102845 2016-01-29
TW105102843 2016-01-29
TW105102842 2016-01-29
TW105119825 2016-06-24
TW105119824 2016-06-24
TW105119824 2016-06-24
TW105119823 2016-06-24
TW105119825 2016-06-24
TW105119823 2016-06-24
TW105128579A TWI690656B (zh) 2016-01-29 2016-09-05 壓電致動器
TW105128579 2016-09-05

Publications (1)

Publication Number Publication Date
KR20170091020A true KR20170091020A (ko) 2017-08-08

Family

ID=57794214

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020170009588A Ceased KR20170091020A (ko) 2016-01-29 2017-01-20 압전 액추에이터

Country Status (4)

Country Link
US (1) US10388850B2 (de)
EP (1) EP3203079B1 (de)
JP (1) JP2017133513A (de)
KR (1) KR20170091020A (de)

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KR102809879B1 (ko) 2020-10-02 2025-05-22 프로리 시스템스 인코포레이티드 능동 방열판
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Also Published As

Publication number Publication date
EP3203079B1 (de) 2021-05-19
US10388850B2 (en) 2019-08-20
JP2017133513A (ja) 2017-08-03
US20170222123A1 (en) 2017-08-03
EP3203079A1 (de) 2017-08-09

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