KR20190111045A - 고압 방전 램프 - Google Patents
고압 방전 램프 Download PDFInfo
- Publication number
- KR20190111045A KR20190111045A KR1020197022306A KR20197022306A KR20190111045A KR 20190111045 A KR20190111045 A KR 20190111045A KR 1020197022306 A KR1020197022306 A KR 1020197022306A KR 20197022306 A KR20197022306 A KR 20197022306A KR 20190111045 A KR20190111045 A KR 20190111045A
- Authority
- KR
- South Korea
- Prior art keywords
- side pipe
- reflector
- light emitting
- tube
- lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
Description
도 2 는, 도 1 에 나타내는 고압 방전 램프의 측면도이다.
도 3 은, 도 1 에 나타내는 고압 방전 램프의 단면도이다.
도 4 는, 도 1 에 나타내는 고압 방전 램프를, 도 3 과 직교하는 위치에서 절단한 단면도이다.
도 5 의 (a) 는, 휘점으로부터 발광된 광의 배향 분포를 나타내는 도면이고, (b) 는, 리플렉터의 반사면에서 반사된 광의 배향 분포 및 불감 영역을 나타내는 도면이다.
도 6 은, 본 실시형태의 고압 방전 램프가 램프 홀더에 장착된 상태를 나타내는 사시도이다.
도 7 은, 램프의 수명 시간을 관리하기 위한 회로를 나타내는 도면이다.
도 8 은, 종래의 고압 방전 램프를 나타내는 단면도이다.
10 : 발광관
11, 12 : 전극
13 : 발광관부
14, 15 : 측관부
20 : 리플렉터
21 : 개구부
22 : 반사면
23 : 삽입공
25 : 평탄면
30 : 애자
34 : 개방부
A : 불감 영역
s : 공간
L1 : 일방의 측관부의 길이
L2 : 타방의 측관부의 길이
Claims (3)
상기 길이 축선 방향의 일방측에 형성되고, 일방의 상기 측관부가 돌출되는 개구부와, 상기 길이 축선 둘레에 형성되는 포물면상의 반사면과, 상기 길이 축선 방향의 타방측에 형성되고, 타방의 상기 측관부가 간극을 갖고 삽입 가능한 삽입공을 갖는 리플렉터와,
상기 발광관과, 상기 리플렉터가 각각 고정되는 애자를 구비하고,
상기 애자는, 상기 타방의 측관부와 상기 리플렉터의 삽입공 사이에 형성된 공간과 외부를 연통하는 개방부를 갖고,
상기 일방의 측관부의 길이는, 상기 타방의 측관부의 길이보다 긴 것을 특징으로 하는 고압 방전 램프.
상기 일방의 측관부는, 상기 램프의 불감 영역 내에 배치되어 있는 것을 특징으로 하는 고압 방전 램프.
상기 리플렉터에는, 상기 개구부에 인접하고, 상기 길이 축선 방향에 수직인 평탄면이 형성되고,
상기 길이 축선 방향에 있어서, 상기 리플렉터의 평탄면으로부터 상기 일방의 측관부까지의 거리 L3 은, 상기 발광관부의 중심으로부터 상기 리플렉터의 평탄면까지의 거리를 L4 로 하였을 때, 0.2 × L4 ≤ L3 ≤ 1.0 × L4 인 것을 특징으로 하는 고압 방전 램프.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017017856 | 2017-02-02 | ||
| JPJP-P-2017-017856 | 2017-02-02 | ||
| PCT/JP2018/003293 WO2018143300A1 (ja) | 2017-02-02 | 2018-01-31 | 高圧放電ランプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20190111045A true KR20190111045A (ko) | 2019-10-01 |
| KR102483865B1 KR102483865B1 (ko) | 2023-01-03 |
Family
ID=63040732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020197022306A Active KR102483865B1 (ko) | 2017-02-02 | 2018-01-31 | 고압 방전 램프 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6457162B2 (ko) |
| KR (1) | KR102483865B1 (ko) |
| CN (2) | CN110249267B (ko) |
| TW (1) | TWI765960B (ko) |
| WO (1) | WO2018143300A1 (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111033385B (zh) * | 2017-08-23 | 2022-09-13 | 凤凰电机公司 | 光源装置、曝光装置以及光源装置的判定方法 |
| WO2020130090A1 (ja) * | 2018-12-21 | 2020-06-25 | 株式会社ブイ・テクノロジー | 露光装置用光照射装置 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003036812A (ja) * | 1999-12-02 | 2003-02-07 | Matsushita Electric Ind Co Ltd | 放電ランプおよびランプ装置 |
| JP2006260891A (ja) * | 2005-03-16 | 2006-09-28 | Phoenix Denki Kk | 超高圧放電灯ユニット |
| JP2012113269A (ja) | 2010-11-29 | 2012-06-14 | Nsk Technology Co Ltd | 露光装置用光照射装置 |
| JP2012114390A (ja) * | 2010-11-29 | 2012-06-14 | Nsk Technology Co Ltd | 露光装置用光照射装置 |
| JP2013004503A (ja) * | 2011-06-22 | 2013-01-07 | Ushio Inc | 光源装置 |
| JP2016200751A (ja) | 2015-04-13 | 2016-12-01 | フェニックス電機株式会社 | 光源装置及び露光装置とその検査方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3004783B2 (ja) * | 1991-09-13 | 2000-01-31 | 株式会社小糸製作所 | 自動車用ヘッドランプ |
| JPH05290716A (ja) * | 1992-04-14 | 1993-11-05 | Toshiba Corp | ヒューズ溶断検出回路 |
| JP2001035203A (ja) * | 1999-07-19 | 2001-02-09 | Iwasaki Electric Co Ltd | 光源装置 |
| CA2361528A1 (en) * | 1999-12-02 | 2001-06-07 | Matsushita Electric Industrial Co., Ltd. | Discharge lamp and lamp device |
| JP2002075014A (ja) * | 2000-06-16 | 2002-03-15 | Matsushita Electric Ind Co Ltd | ランプユニットおよび画像投影装置 |
| JP3855955B2 (ja) * | 2003-03-28 | 2006-12-13 | セイコーエプソン株式会社 | 光源装置及びプロジェクタ |
| KR20040102301A (ko) * | 2003-05-27 | 2004-12-04 | 삼성전자주식회사 | 보조광원을 채용하는 조명 장치 및 프로젝션 시스템 |
| DE102004032406A1 (de) * | 2004-07-02 | 2006-02-16 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | Verfahren zur Auslegung einer Entladungslampe |
| CN1881522A (zh) * | 2005-06-15 | 2006-12-20 | 晶赞光电股份有限公司 | 一种具有辅助反射装置的高压气体放电灯 |
| CN101082403A (zh) * | 2006-05-30 | 2007-12-05 | 优志旺电机株式会社 | 光源装置 |
| CN101711420B (zh) * | 2007-05-04 | 2012-03-21 | 奥斯兰姆有限公司 | 带有点燃辅助部件的高压放电灯 |
| JP5243837B2 (ja) * | 2008-04-14 | 2013-07-24 | 三菱電機照明株式会社 | 反射鏡付放電ランプ |
| JP2010244821A (ja) * | 2009-04-06 | 2010-10-28 | Ushio Inc | 光照射装置 |
| DE202009011727U1 (de) * | 2009-08-28 | 2009-12-17 | Osram Gesellschaft mit beschränkter Haftung | Entladungslampe mit Reflektor |
| JP5376409B2 (ja) * | 2010-01-07 | 2013-12-25 | ウシオ電機株式会社 | 光源装置および光照射装置 |
| JP2013012389A (ja) * | 2011-06-29 | 2013-01-17 | Ushio Inc | 光源素子 |
-
2018
- 2018-01-31 JP JP2018552268A patent/JP6457162B2/ja active Active
- 2018-01-31 CN CN201880009946.0A patent/CN110249267B/zh active Active
- 2018-01-31 WO PCT/JP2018/003293 patent/WO2018143300A1/ja not_active Ceased
- 2018-01-31 KR KR1020197022306A patent/KR102483865B1/ko active Active
- 2018-01-31 CN CN202110935321.0A patent/CN113791521A/zh active Pending
- 2018-02-02 TW TW107103760A patent/TWI765960B/zh active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003036812A (ja) * | 1999-12-02 | 2003-02-07 | Matsushita Electric Ind Co Ltd | 放電ランプおよびランプ装置 |
| JP2006260891A (ja) * | 2005-03-16 | 2006-09-28 | Phoenix Denki Kk | 超高圧放電灯ユニット |
| JP2012113269A (ja) | 2010-11-29 | 2012-06-14 | Nsk Technology Co Ltd | 露光装置用光照射装置 |
| JP2012114390A (ja) * | 2010-11-29 | 2012-06-14 | Nsk Technology Co Ltd | 露光装置用光照射装置 |
| JP2013004503A (ja) * | 2011-06-22 | 2013-01-07 | Ushio Inc | 光源装置 |
| JP2016200751A (ja) | 2015-04-13 | 2016-12-01 | フェニックス電機株式会社 | 光源装置及び露光装置とその検査方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2018143300A1 (ja) | 2019-02-07 |
| CN110249267A (zh) | 2019-09-17 |
| CN110249267B (zh) | 2021-09-03 |
| CN113791521A (zh) | 2021-12-14 |
| TW201832268A (zh) | 2018-09-01 |
| JP6457162B2 (ja) | 2019-01-23 |
| TWI765960B (zh) | 2022-06-01 |
| WO2018143300A1 (ja) | 2018-08-09 |
| KR102483865B1 (ko) | 2023-01-03 |
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