KR970052835U - 웨이퍼 세척조 - Google Patents

웨이퍼 세척조

Info

Publication number
KR970052835U
KR970052835U KR2019960002818U KR19960002818U KR970052835U KR 970052835 U KR970052835 U KR 970052835U KR 2019960002818 U KR2019960002818 U KR 2019960002818U KR 19960002818 U KR19960002818 U KR 19960002818U KR 970052835 U KR970052835 U KR 970052835U
Authority
KR
South Korea
Prior art keywords
wafer cleaning
cleaning bath
bath
wafer
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR2019960002818U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960002818U priority Critical patent/KR970052835U/ko
Publication of KR970052835U publication Critical patent/KR970052835U/ko
Withdrawn legal-status Critical Current

Links

KR2019960002818U 1996-02-24 1996-02-24 웨이퍼 세척조 Withdrawn KR970052835U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960002818U KR970052835U (ko) 1996-02-24 1996-02-24 웨이퍼 세척조

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960002818U KR970052835U (ko) 1996-02-24 1996-02-24 웨이퍼 세척조

Publications (1)

Publication Number Publication Date
KR970052835U true KR970052835U (ko) 1997-09-08

Family

ID=60873946

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960002818U Withdrawn KR970052835U (ko) 1996-02-24 1996-02-24 웨이퍼 세척조

Country Status (1)

Country Link
KR (1) KR970052835U (ko)

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Legal Events

Date Code Title Description
UA0108 Application for utility model registration

St.27 status event code: A-0-1-A10-A12-nap-UA0108

UG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-UG1501

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

UN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-UN2301

St.27 status event code: A-3-3-R10-R11-asn-UN2301

UN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-UN2301

St.27 status event code: A-3-3-R10-R11-asn-UN2301

UC1204 Withdrawal of no request for examination

St.27 status event code: N-1-6-B10-B12-nap-UC1204

WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid
R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

UN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-UN2301

St.27 status event code: A-3-3-R10-R11-asn-UN2301

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

UN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-UN2301

St.27 status event code: A-3-3-R10-R11-asn-UN2301

UN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-UN2301

St.27 status event code: A-3-3-R10-R11-asn-UN2301

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000