KR970063379A - 광원장치 - Google Patents

광원장치 Download PDF

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Publication number
KR970063379A
KR970063379A KR1019970003596A KR19970003596A KR970063379A KR 970063379 A KR970063379 A KR 970063379A KR 1019970003596 A KR1019970003596 A KR 1019970003596A KR 19970003596 A KR19970003596 A KR 19970003596A KR 970063379 A KR970063379 A KR 970063379A
Authority
KR
South Korea
Prior art keywords
condensing mirror
cooling wind
discharge lamp
mercury
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
KR1019970003596A
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English (en)
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KR100428959B1 (ko
Inventor
기요타다 나카무라
아키라 사토미
도시유키 시마
신키치 모리모토
Original Assignee
다나카 아키히로
우시오덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 다나카 아키히로, 우시오덴키 가부시키가이샤 filed Critical 다나카 아키히로
Publication of KR970063379A publication Critical patent/KR970063379A/ko
Application granted granted Critical
Publication of KR100428959B1 publication Critical patent/KR100428959B1/ko
Anticipated expiration legal-status Critical
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
    • H01J61/822—High-pressure mercury lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
    • H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour

Landscapes

  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Liquid Crystal (AREA)
  • Fastening Of Light Sources Or Lamp Holders (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Projection Apparatus (AREA)

Abstract

본 발명은 정격소비전력이 큰 수은방전등이 집광미러내에 배치되어, 전방 개구부로부터 흐르는 냉각풍을 발생시키는 수단을 가지는 광원장치로서, 점등했을 때에 봉입된 수은이 완전히 증발하여 충분히 큰 강도의 광방사가 얻어지고, 전방 마우스피스의 과열상태를 유효하게 방지할 수 있는 광원장치를 제공하는 것을 목적으로 하며, 본 발명의 광원장치는 집광미러와, 집광미러의 광축을 따라 뻗도록 배치된 중앙팽출부분과 양단의 봉지관부를 가지는 봉체를 구비하여 이루어지고, 수은의 봉입량이 25㎎/㎤ 이상으로, 정격 소비전력이 2.5kw 이상의 수은방전등과, 집광미러의 전방개구로부터 중앙기부를 향해 흐르도록 냉각풍을 발생시키는 냉각풍 발생수단과, 수은방전등의 전방측 봉지관부의 마우스피스에 설치된 집광미러이 전방개구로부터의 냉각풍을 광축으로부터 이간하도록 외방으로 편향시키는 냉각풍 편향부분을 가진 금속판부재를 가진다.

Description

광원장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 광원장치의 일례의 구성을 도시한 설명도.
제2도는 본 발명의 광원장치의 수은방전등의 구성의 일례를 도시한 설명도.
제3도는 금속판부재의 일례를 도시한 사시도.
제4도는 금속판부재의 다른 예를 도시한 사시도.
제5도는 금속판부재의 또 다른 예를 도시한 사시도.
제6도는 금속판부재의 다른 예를 도시한 사시도.
제7도는 호온(HORN) 형상의 핀을 가지는 금속판부재에 의한 예를 도시한 설명도.

Claims (3)

  1. 집광미러와, 이 집광미러의 광축을 따라 뻗도록 배치된 중앙팽출부분과 양단의 봉지관부를 가지는 봉체를 구비하여 이루어지고, 수은의 봉입량이 25㎎/㎤ 이상이고 정격 소비전력이 2.5kw 이상인 수은방전등과, 집광미러의 전방개구로부터 중앙기부를 향해서 흐르도록 냉각풍을 발생시키는 냉각풍 발생수단과, 수은방전등의 전방측 봉지관부의 마우스피스에 설치된 집광미러의 전방개구로부터의 냉각풍을 광축으로부터 이간하도록 외방으로 편향시키는 냉각풍 편향부분을 가지는 금속판부재를 가지는 것을 특징으로 하는 광원장치.
  2. 제1항에 있어서, 집광미러의 광축에 직각인 민내에 있어서의 금속판부재의 최대직경이 봉체의 중앙팽출부분의 최대 외경 이하인 것을 특징으로 하는 광원장치.
  3. 제1항 또는 제2항에 있어서, 금속판부재의 냉각풍 편향부분이 수은방전등의 봉체의 중앙팽출부분의 전면영역을 덮는 커버부분을 가지는 것을 특징으로 하는 광원장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970003596A 1996-02-05 1997-02-05 광원장치 Expired - Lifetime KR100428959B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP96-18507 1996-02-05
JP01850796A JP3189661B2 (ja) 1996-02-05 1996-02-05 光源装置

Publications (2)

Publication Number Publication Date
KR970063379A true KR970063379A (ko) 1997-09-12
KR100428959B1 KR100428959B1 (ko) 2004-07-16

Family

ID=11973547

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970003596A Expired - Lifetime KR100428959B1 (ko) 1996-02-05 1997-02-05 광원장치

Country Status (2)

Country Link
JP (1) JP3189661B2 (ko)
KR (1) KR100428959B1 (ko)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000082322A (ja) * 1998-09-08 2000-03-21 Ushio Inc 光源ユニット
EP2157480B1 (en) 2003-04-09 2015-05-27 Nikon Corporation Exposure method and apparatus, and device manufacturing method
TWI360158B (en) 2003-10-28 2012-03-11 Nikon Corp Projection exposure device,exposure method and dev
TWI385414B (zh) 2003-11-20 2013-02-11 尼康股份有限公司 光學照明裝置、照明方法、曝光裝置、曝光方法以及元件製造方法
TWI609410B (zh) 2004-02-06 2017-12-21 尼康股份有限公司 光學照明裝置、曝光裝置、曝光方法以及元件製造方法
KR20140140648A (ko) 2005-05-12 2014-12-09 가부시키가이샤 니콘 투영 광학계, 노광 장치 및 노광 방법
KR101685858B1 (ko) 2006-09-01 2016-12-12 가부시키가이샤 니콘 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법
KR102331533B1 (ko) 2007-04-12 2021-11-26 가부시키가이샤 니콘 방전램프
US9165738B2 (en) 2007-04-12 2015-10-20 Nikon Corporation Discharge lamp, connecting cable, light source apparatus, and exposure apparatus
KR101994887B1 (ko) 2007-04-12 2019-07-02 가부시키가이샤 니콘 방전램프, 접속용 케이블, 광원장치 및 노광장치
US7728495B2 (en) * 2007-08-01 2010-06-01 Osram Sylvania Inc. HID lamp with frit seal thermal control
DE102007045079A1 (de) * 2007-09-21 2009-04-02 Osram Gesellschaft mit beschränkter Haftung Hochdruckentladungslampe
JP5267029B2 (ja) 2007-10-12 2013-08-21 株式会社ニコン 照明光学装置、露光装置及びデバイスの製造方法
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9116346B2 (en) 2007-11-06 2015-08-25 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
JP4811482B2 (ja) 2009-03-16 2011-11-09 セイコーエプソン株式会社 光源装置およびプロジェクター
DE102009029867A1 (de) * 2009-06-22 2010-12-23 Osram Gesellschaft mit beschränkter Haftung Hochdruckentladungslampe
JP6645532B2 (ja) * 2018-04-11 2020-02-14 株式会社ニコン 光源装置、露光装置、およびデバイス製造方法
JP2020060798A (ja) * 2020-01-09 2020-04-16 株式会社ニコン 光源装置、露光装置、ランプ、メンテナンス方法およびデバイス製造方法
JP7645690B2 (ja) * 2021-04-12 2025-03-14 キヤノン株式会社 ランプ、光源装置、露光装置、および物品製造方法

Also Published As

Publication number Publication date
JP3189661B2 (ja) 2001-07-16
JPH09213129A (ja) 1997-08-15
KR100428959B1 (ko) 2004-07-16

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