KR970077101A - 반도체용 화학약품의 공급장치 - Google Patents

반도체용 화학약품의 공급장치 Download PDF

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Publication number
KR970077101A
KR970077101A KR1019960016959A KR19960016959A KR970077101A KR 970077101 A KR970077101 A KR 970077101A KR 1019960016959 A KR1019960016959 A KR 1019960016959A KR 19960016959 A KR19960016959 A KR 19960016959A KR 970077101 A KR970077101 A KR 970077101A
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South Korea
Prior art keywords
container
photoresist
cap
chemical agent
jig
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KR1019960016959A
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KR0183858B1 (ko
Inventor
김해근
김용수
정주효
김민훈
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김광호
삼성전자 주식회사
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Priority to KR1019960016959A priority Critical patent/KR0183858B1/ko
Publication of KR970077101A publication Critical patent/KR970077101A/ko
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Closures For Containers (AREA)

Abstract

포토레지스트 용기의 입구에 부착되어 이 포토레지스트를 소정의 공정장비로 공급하기 위해 사용되는 캡을 다른 화학약품 용기에도 적용하여 사용할 수 있도록 상기 캡과 화학약품 용기 사이에 개재되는 지그에 대해 기재되어 있다. 본 발명의 반도체용 화학약품의 공급장치는 포토레지스트 용기의 입구부에 부착하여 상기 포토레지스트를 소정의 공정장비로 공급하기 위한 배출구 및 상기 포토레지스트 용기내에 배출압력을 가하기 위한 가압부로 이루어진 캡을 구비하는 반도체용 화학약품의 공급장치에 있어서, 상기 캡을 포토레지스트 용기 이외의 소정의 화학약품 용기에 적용하고자 할 때, 상기 소정의 화학약품 용기와 캡 사이를 연결시켜 주기 위한 지그를 더 구비하는 것을 특징으로 한다. 따라서, 본 발명에 따른 반도체용 화학약품의 공급장치에 의하면, 상기 지그를 사용함으로써 화학약품을 옮겨 담는 과정에서 발생되는 종래의 환경악화나 오염의 문제를 해소할 수 있게 된다. 또한, 종래의 경우에 예컨대 티너를 포토레지스트의 용기에 완전히 옮겨 담기에 앞서 티너를 이용하여 포토레지스트의 용기의 내부를 수차례 세정해야 하는 번거로움이 있었으나 이 또한 해소할 수 있게 된다.

Description

반도체용 화학약품의 공급장치
내용없음

Claims (2)

  1. 포토레지스트 용기의 입구부에 부착하여 상기 포토레지스트를 소정의 공정장비로 공급하기 위한 배출구 및 상기 포토레지스트 용기내에 배출압력을 가하기 위한 가압부로 이루어진 캡을 구비하는 반도체용 화학약품의 공급장치에 있어서, 상기 캡을 포토레지스트 용기 이외의 소정의 화학약품 용기에 적용하고자 할 때, 상기 소정의 화학약품 용기와 캡 사이를 연결시켜 주기 위한 지그를 더 구비하는 것을 특징으로 하는 반도체용 화학약품의 공급장치.
  2. 제1항에 있어서, 상기 지그의 상부에는 상기 캡에 맞추어 끼워지도록 소정 크기의 나사홈을 구비하고, 하부에는 소정의 화학약품 용기 각각에 맞추어 끼워질 수 있는 나사홈을 구비하여 이루어진 것을 특징으로 하는 반도체용 화학약품의 공급장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.
KR1019960016959A 1996-05-20 1996-05-20 반도체용 화학약품의 공급장치 Expired - Fee Related KR0183858B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960016959A KR0183858B1 (ko) 1996-05-20 1996-05-20 반도체용 화학약품의 공급장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960016959A KR0183858B1 (ko) 1996-05-20 1996-05-20 반도체용 화학약품의 공급장치

Publications (2)

Publication Number Publication Date
KR970077101A true KR970077101A (ko) 1997-12-12
KR0183858B1 KR0183858B1 (ko) 1999-04-15

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ID=19459181

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960016959A Expired - Fee Related KR0183858B1 (ko) 1996-05-20 1996-05-20 반도체용 화학약품의 공급장치

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100770361B1 (ko) * 2007-01-17 2007-10-26 (주)지오엘리먼트 화학약품의 고순도 충전 방법 및 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100770361B1 (ko) * 2007-01-17 2007-10-26 (주)지오엘리먼트 화학약품의 고순도 충전 방법 및 장치

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