KR970077151A - Furnace of semiconductor manufacturing apparatus - Google Patents

Furnace of semiconductor manufacturing apparatus Download PDF

Info

Publication number
KR970077151A
KR970077151A KR1019960015559A KR19960015559A KR970077151A KR 970077151 A KR970077151 A KR 970077151A KR 1019960015559 A KR1019960015559 A KR 1019960015559A KR 19960015559 A KR19960015559 A KR 19960015559A KR 970077151 A KR970077151 A KR 970077151A
Authority
KR
South Korea
Prior art keywords
furnace
tube
semiconductor manufacturing
process tube
manufacturing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019960015559A
Other languages
Korean (ko)
Inventor
이천무
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960015559A priority Critical patent/KR970077151A/en
Publication of KR970077151A publication Critical patent/KR970077151A/en
Withdrawn legal-status Critical Current

Links

Abstract

본 발명은 반도체 제조 장치의 퍼니스에 관한 것으로, 본 발명에 따른 수평형 퍼니스에 있어서, 앳모스캔 튜브에 형성된 플랜지는 상기 프로세스 튜브의 단부와 접하는 면에 부착된 탄성 재질의 0-링을 포함한다.The present invention relates to a furnace of a semiconductor manufacturing apparatus. In the horizontal furnace according to the present invention, the flange formed on the atom scan tube includes an elastic O-ring attached to a surface of the furnace tube contacting the end of the process tube.

본 발명에 의하면, 프로세스 튜브와 앳모스캔 튜브 사이의 밀봉 효과를 향상시킬 수 있다.According to the present invention, the sealing effect between the process tube and the atom scan tube can be improved.

Description

반도체 제조 장치의 퍼니스Furnace of semiconductor manufacturing apparatus

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제2A도 및 제2B도는 본 발명에 따른 수평형 퍼니스의 일부 구성을 개략적으로 도시한 도면이다.2A and 2B are views schematically showing a part of the construction of a horizontal flue according to the present invention.

Claims (2)

반도체 제조 공정을 진행하기 위한 프로세스 튜브와, 상기 프로세스 튜브의 내부로 삽입되고 상기 프로세스 튜브와의 밀봉을 위한 플랜지가 형성된 앳모스캔 튜브를 포함하는 반도체 제조 장치의 수평형 퍼니스에 있어서, 상기 플랜지는 상기 프로세스 튜브의 단부와 접하는 면에 부착된 탄성 재질의 0-링을 포함하는 것을 특징으로 하는 반도체 제조 장치의 수평형 퍼니스.1. A horizontal furnace of a semiconductor manufacturing apparatus, comprising: a process tube for conducting a semiconductor manufacturing process; and an instantaneous scan tube inserted into the process tube and formed with a flange for sealing the process tube, Ring of an elastic material attached to a surface of the process tube which is in contact with an end of the process tube. 제1항에 있어서, 상기 플랜지는 스테인레스 스틸 재질로 구성되고, 상기 플랜지와 접하는 상기 프로세스튜브의 단부에는 냉각수가 도입되는 냉각 유로가 설치된 것을 특징으로 하는 반도체 제조 장치의 수평형 퍼니스.The horizontal furnace of claim 1, wherein the flange is made of stainless steel, and a cooling channel is introduced to an end of the process tube in contact with the flange. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960015559A 1996-05-11 1996-05-11 Furnace of semiconductor manufacturing apparatus Withdrawn KR970077151A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960015559A KR970077151A (en) 1996-05-11 1996-05-11 Furnace of semiconductor manufacturing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960015559A KR970077151A (en) 1996-05-11 1996-05-11 Furnace of semiconductor manufacturing apparatus

Publications (1)

Publication Number Publication Date
KR970077151A true KR970077151A (en) 1997-12-12

Family

ID=66219974

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960015559A Withdrawn KR970077151A (en) 1996-05-11 1996-05-11 Furnace of semiconductor manufacturing apparatus

Country Status (1)

Country Link
KR (1) KR970077151A (en)

Similar Documents

Publication Publication Date Title
DE59708514D1 (en) Cable gland
KR920000967A (en) Method of Forming Silicon Nitride Film
PT1140393E (en) TAMPAO ROD
DE3768413D1 (en) CONNECTION OF PLASTIC PIPES.
KR900006535A (en) Gas distributor
KR970077151A (en) Furnace of semiconductor manufacturing apparatus
NO174564C (en) Method of branching pipes
KR910007608A (en) Electrical connection on the wall of metallurgical vessel in contact with molten metal
ES2116058T3 (en) PROXIMITY SWITCH WITH CERAMIC FRONT SURFACE AND PROCEDURE FOR ITS MANUFACTURE.
JPS5229624A (en) Construction for pipe joint
DE59000394D1 (en) FUELLWAGEN FOR A KOKSOFENBATTERIE.
KR910011366A (en) Injection pipe joint device for metallurgy vessel
KR850008632A (en) Nozzle Device to Accelerate Solid Particles
KR870004741A (en) Slurry injection window of furnace
KR910007098A (en) Wafer support jig and pressure reduction gas growth method using this jig
KR940003847A (en) Crack prevention device of nickel container for caustic soda production
ATE255710T1 (en) DEVICE FOR THE GAS-TIGHT CONNECTION OF AN EXHAUST PIPE
KR920013579A (en) Projection Cathode Ray Tube
JPS5232453A (en) Welding bellow
JPS53135020A (en) Bent pipe supporting method
KR970063332A (en) Panel structure of flat CRT
KR870000537A (en) Joint for pipe with end flare
KR970072039A (en) Low-pressure metastasis-wearing bell-type diffusion furnace
KR930703570A (en) Pipe joint
KR970023685A (en) Structure of Semiconductor Vertical Furnace

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

PC1203 Withdrawal of no request for examination

St.27 status event code: N-1-6-B10-B12-nap-PC1203

WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid
PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000