KR970077282A - 반도체 기판 세정 용액 - Google Patents

반도체 기판 세정 용액 Download PDF

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Publication number
KR970077282A
KR970077282A KR1019960018521A KR19960018521A KR970077282A KR 970077282 A KR970077282 A KR 970077282A KR 1019960018521 A KR1019960018521 A KR 1019960018521A KR 19960018521 A KR19960018521 A KR 19960018521A KR 970077282 A KR970077282 A KR 970077282A
Authority
KR
South Korea
Prior art keywords
cleaning solution
semiconductor substrate
substrate cleaning
hydrofluoric acid
ammonium fluoride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
KR1019960018521A
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English (en)
Other versions
KR100190042B1 (ko
Inventor
박재균
최영준
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960018521A priority Critical patent/KR100190042B1/ko
Publication of KR970077282A publication Critical patent/KR970077282A/ko
Application granted granted Critical
Publication of KR100190042B1 publication Critical patent/KR100190042B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/02—Inorganic compounds
    • C11D7/04—Water-soluble compounds
    • C11D7/10—Salts
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C11D2111/22—Electronic devices, e.g. PCBs or semiconductors

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  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Detergent Compositions (AREA)

Abstract

본 발명은 반도체 기판 세정 용액에 관한 것이다. 하기 식(Ⅰ)로 표시되는 불화암모늄, 불산 및 탈이온수를 포함하는 세정 용액을 이용하면, 현상 공정 후에 표면에 남아 있는 유기 물질을 효과적으로 제거할 수 있다.
RNH3F ( I )
여기에서, R은 C2∼C18탄화수소임.

Description

반도체 기판 세정 용액
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (3)

  1. 하기 식( I )로 표시되는 불화암모늄, 불산 및 탈이온수를 포함하는 것을 특징으로 하는 반도체 기판 세정용액.
    RNH3F ( I )
    여기에서, R은 C2∼C18탄화수소임.
  2. 제1항에 있어서, 상기 불화암모늄의 함유량은 상기 불산 1몰에 대하여 2내지 7몰인 것을 특징으로 하는 반도체 기판 세정 용액.
  3. 제1항에 있어서, 상기 탈이온수는 상기 불화암모늄 및 불산의 총중량에 대하여 100중량% 이하인 것을 특징으로 하는 반도체 기판 세정 용액.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960018521A 1996-05-29 1996-05-29 반도체 기판 세정 용액 Expired - Fee Related KR100190042B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960018521A KR100190042B1 (ko) 1996-05-29 1996-05-29 반도체 기판 세정 용액

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960018521A KR100190042B1 (ko) 1996-05-29 1996-05-29 반도체 기판 세정 용액

Publications (2)

Publication Number Publication Date
KR970077282A true KR970077282A (ko) 1997-12-12
KR100190042B1 KR100190042B1 (ko) 1999-06-01

Family

ID=19460081

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960018521A Expired - Fee Related KR100190042B1 (ko) 1996-05-29 1996-05-29 반도체 기판 세정 용액

Country Status (1)

Country Link
KR (1) KR100190042B1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6369008B1 (en) 1999-09-20 2002-04-09 Samsung Electronics Co., Ltd. Cleaning solutions for removing contaminants from the surfaces of semiconductor substrates and cleaning methods using the same
KR100554515B1 (ko) * 2003-02-27 2006-03-03 삼성전자주식회사 세정액 및 이를 이용한 기판의 세정방법

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102612978B1 (ko) 2022-08-02 2023-12-13 나가세 엔지니어링 서비스 코리아(주) 혼합 시스템

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6369008B1 (en) 1999-09-20 2002-04-09 Samsung Electronics Co., Ltd. Cleaning solutions for removing contaminants from the surfaces of semiconductor substrates and cleaning methods using the same
KR100338764B1 (ko) * 1999-09-20 2002-05-30 윤종용 반도체 기판의 오염 물질을 제거하기 위한 세정액 및 이를 이용한 세정방법
KR100554515B1 (ko) * 2003-02-27 2006-03-03 삼성전자주식회사 세정액 및 이를 이용한 기판의 세정방법

Also Published As

Publication number Publication date
KR100190042B1 (ko) 1999-06-01

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