KR970077377A - 테이프 마운팅(tape mounting)장치 - Google Patents

테이프 마운팅(tape mounting)장치 Download PDF

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Publication number
KR970077377A
KR970077377A KR1019960016345A KR19960016345A KR970077377A KR 970077377 A KR970077377 A KR 970077377A KR 1019960016345 A KR1019960016345 A KR 1019960016345A KR 19960016345 A KR19960016345 A KR 19960016345A KR 970077377 A KR970077377 A KR 970077377A
Authority
KR
South Korea
Prior art keywords
wafer
tape
chuck
mounting device
tape mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
KR1019960016345A
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English (en)
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KR0185053B1 (ko
Inventor
한창훈
홍인표
김용
정명기
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960016345A priority Critical patent/KR0185053B1/ko
Publication of KR970077377A publication Critical patent/KR970077377A/ko
Application granted granted Critical
Publication of KR0185053B1 publication Critical patent/KR0185053B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0442—Apparatus for placing on an insulating substrate, e.g. tape

Landscapes

  • Dicing (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

본 발명은 테이프 마운팅 장치의 척 내부에 안내부를 형성하여 척에 안착된 웨이퍼의 중앙부에 공기를 집중적으로 안내함으로써 웨이퍼에 접착 테이프를 접착하는 동안 롤러 자체의 하중에 의해 웨이퍼가 휘어지는 것을 방지하여 접착 테이프와 웨이퍼와의 접착성을 향상시킨다. 따라서, 스크라이빙시 칩들의 하면 칩핑 현상이 방지되어 칩들의 품질이 향상된다.

Description

테이프 마운팅(tape mounting)장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명에 의한 테이프 마운팅 장치의 작동 상태도.

Claims (2)

  1. 롤러를 이용하여 접착 테이프를 웨이퍼에 접착하는 테이프 마운팅 장치의 척에 있어서, 상기 롤러에 의해 웨이퍼가 휘어지는 것을 방지하기 위해 상기 척의 주입구를 거쳐 주입되는 공기를 상기 웨이퍼의 중앙부로 안내하는 안내부가 상기 척의 내측에 형성되어 있는 것을 특징으로 하는 테이프 마운팅 장치.
  2. 제1항에 있어서, 상기 안내부가 관 형태를 갖는 것을 특징으로 하는 테이프 마운팅 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960016345A 1996-05-16 1996-05-16 테이프 마운팅 장치 Expired - Fee Related KR0185053B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960016345A KR0185053B1 (ko) 1996-05-16 1996-05-16 테이프 마운팅 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960016345A KR0185053B1 (ko) 1996-05-16 1996-05-16 테이프 마운팅 장치

Publications (2)

Publication Number Publication Date
KR970077377A true KR970077377A (ko) 1997-12-12
KR0185053B1 KR0185053B1 (ko) 1999-04-15

Family

ID=19458861

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960016345A Expired - Fee Related KR0185053B1 (ko) 1996-05-16 1996-05-16 테이프 마운팅 장치

Country Status (1)

Country Link
KR (1) KR0185053B1 (ko)

Also Published As

Publication number Publication date
KR0185053B1 (ko) 1999-04-15

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