LT2014090A - Lazerinio pluošto skersinio profilio formuotuvas, išsaugantis bangos fronto kreivumą, ir jo panaudojimo būdas - Google Patents
Lazerinio pluošto skersinio profilio formuotuvas, išsaugantis bangos fronto kreivumą, ir jo panaudojimo būdasInfo
- Publication number
- LT2014090A LT2014090A LT2014090A LT2014090A LT2014090A LT 2014090 A LT2014090 A LT 2014090A LT 2014090 A LT2014090 A LT 2014090A LT 2014090 A LT2014090 A LT 2014090A LT 2014090 A LT2014090 A LT 2014090A
- Authority
- LT
- Lithuania
- Prior art keywords
- polarisation
- optical element
- nanogratings
- txy
- anisotropic layer
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 abstract 4
- 230000005540 biological transmission Effects 0.000 abstract 2
- 238000007493 shaping process Methods 0.000 abstract 2
- 230000001131 transforming effect Effects 0.000 abstract 2
- 241001270131 Agaricus moelleri Species 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 239000005350 fused silica glass Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0944—Diffractive optical elements, e.g. gratings, holograms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3083—Birefringent or phase retarding elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2308—Amplifier arrangements, e.g. MOPA
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Polarising Elements (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
Lazerinio pluošto skersinio profilio formuotuvas apima poliarizaciją transformuojantį optinį elementą ir poliarizaciją analizuojantį optinį elementą, kurie bendrai veikdami įneša lokalinius pluošto galios nuostolius bei sukuria tam tikrą pralaidumo raštą, aprašomą skirstiniu TXY. Poliarizaciją transformuojantis optinis elementas yra pagamintas tiesioginio lazerinio įrašymo metodu iš skaidrios optiškai izotropinės medžiagos, pavyzdžiui lydyto kvarco, jos tūryje suformuojant bent vieną anizotropinį sluoksnį su įrašytomis dvejopai šviesą laužiančiomis nanogardelėmis, atsirandančiomis dėl savaiminio medžiagos struktūros persitvarkymo paveikus femtosekundiniais tiesiškai poliarizuotos lazerinės spinduliuotės impulsais. Visose skersinėse anizotropinio sluoksnio padėtyse yra suformuojamas vienodas fazės vėlinimas tarp dviejų statmenų poliarizacijos dedamųjų. Skirtingai orientuojant dvejopai šviesą laužiančias nanogardeles yra pasiekiamas nevienodas poliarizaciją transformuojančio optinio elemento poveikis pluošto spindulių poliarizacijai ir reikiamas formuotuvo pralaidumo skirstinys TXY. Išradimas gali būti panaudotas didelės galios lazerinėse sistemose pageidaujamos formos pluošto skersiniam profiliui suformuoti. Transformuojant gausinį pluoštą į plokščios viršūnės pluoštą, galios naudingumo koeficientas yra ne mažesnis kaip 50%.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| LT2014090A LT6250B (lt) | 2014-07-10 | 2014-07-10 | Lazerinio pluošto skersinio profilio formuotuvas, išsaugantis bangos fronto kreivumą, ir jo panaudojimo būdas |
| EP15176241.6A EP2965852B1 (en) | 2014-07-10 | 2015-07-10 | Optical arrangement for laser beam shaping |
| LTEP15176241.6T LT2965852T (lt) | 2014-07-10 | 2015-07-10 | Lazerinio pluošto formuotuvas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| LT2014090A LT6250B (lt) | 2014-07-10 | 2014-07-10 | Lazerinio pluošto skersinio profilio formuotuvas, išsaugantis bangos fronto kreivumą, ir jo panaudojimo būdas |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| LT2014090A true LT2014090A (lt) | 2016-01-11 |
| LT6250B LT6250B (lt) | 2016-02-25 |
Family
ID=53610778
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| LT2014090A LT6250B (lt) | 2014-07-10 | 2014-07-10 | Lazerinio pluošto skersinio profilio formuotuvas, išsaugantis bangos fronto kreivumą, ir jo panaudojimo būdas |
| LTEP15176241.6T LT2965852T (lt) | 2014-07-10 | 2015-07-10 | Lazerinio pluošto formuotuvas |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| LTEP15176241.6T LT2965852T (lt) | 2014-07-10 | 2015-07-10 | Lazerinio pluošto formuotuvas |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP2965852B1 (lt) |
| LT (2) | LT6250B (lt) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11892292B2 (en) | 2017-06-06 | 2024-02-06 | RD Synergy Ltd. | Methods and systems of holographic interferometry |
| WO2019012642A1 (ja) * | 2017-07-13 | 2019-01-17 | ギガフォトン株式会社 | レーザシステム |
| JP6674422B2 (ja) * | 2017-09-14 | 2020-04-01 | フタバ産業株式会社 | レーザ溶接装置、及び、部材の製造方法 |
| DE102017126453A1 (de) * | 2017-11-10 | 2019-05-16 | Amphos GmbH | Verfahren zur Laserverstärkung |
| CN108489931A (zh) * | 2018-05-29 | 2018-09-04 | 天津大学 | 一种提高太赫兹参量振荡源测量稳定性的装置及方法 |
| US11719531B2 (en) * | 2018-10-30 | 2023-08-08 | RD Synergy Ltd. | Methods and systems of holographic interferometry |
| CN109541736B (zh) * | 2018-11-27 | 2021-01-05 | 河海大学 | 一种基于多层梯度折射率透膜的布儒斯特角起偏器 |
| CN113498488A (zh) * | 2019-03-19 | 2021-10-12 | 株式会社村田制作所 | 光学装置 |
| LT6781B (lt) * | 2019-03-20 | 2020-11-25 | Uab "Ekspla" | Depoliarizacijos kompensatorius |
| JP7278135B2 (ja) * | 2019-04-02 | 2023-05-19 | キヤノン株式会社 | インプリント装置および物品製造方法 |
| GB201912337D0 (en) | 2019-08-28 | 2019-10-09 | Univ Southampton | Method of forming birefringent structures in an optical element |
| CN110385521B (zh) * | 2019-08-29 | 2021-03-16 | 西安交通大学 | 一种用于碳化硅快速深刻蚀的飞秒激光加工装置及方法 |
| CN111221132B (zh) * | 2019-11-20 | 2021-10-26 | 中国科学院光电技术研究所 | 一种扇形子孔径微透镜阵列测量涡旋光束拓扑荷数的方法和装置 |
| CN111240012B (zh) * | 2020-01-17 | 2021-11-16 | 中国工程物理研究院激光聚变研究中心 | 一种基于导模共振亚波长光栅编码的光束近场整形方法 |
| DE102020204123A1 (de) * | 2020-03-30 | 2021-09-30 | Trumpf Laser- Und Systemtechnik Gmbh | Verfahren zum Herstellen einer Lichtablenkungsstruktur, Verwendung eines Substrats mit einer solchen Lichtablenkungsstruktur, und Lichtablenkeinheit mit einer solchen Lichtablenkungsstruktur |
| CN111736423A (zh) * | 2020-07-16 | 2020-10-02 | 南京诚芯集成电路技术研究院有限公司 | 一种基于模型仿真的激光直写光学邻近效应校正方法 |
| CN113231750B (zh) * | 2021-03-18 | 2022-07-19 | 武汉大学 | 一种脉冲激光打孔系统及打孔方法 |
| CN113960826B (zh) * | 2021-06-10 | 2023-12-22 | 北京航空航天大学 | 一种抽运激光的光束整形方法及装置 |
| IL284740B2 (en) | 2021-07-08 | 2023-05-01 | Elbit Systems Electro Optics Elop Ltd | Optical correction component for coherent beam combining systems and coherent beam combining methods and systems using an optical correction component |
| DE102021122754A1 (de) | 2021-09-02 | 2023-03-02 | Trumpf Laser Gmbh | Vorrichtung zum Bearbeiten eines Materials |
| CN114077066B (zh) * | 2021-10-13 | 2023-09-29 | 深圳朗光科技有限公司 | 扩束准直器 |
| IL294523B2 (en) * | 2022-07-04 | 2026-01-01 | Elbit Systems Electro Optics Elop Ltd | Systems, definitions, units and methods for profiling a change fund |
| CN115220313A (zh) * | 2022-08-02 | 2022-10-21 | 苏州大学 | 一种激光干涉光刻系统及硅透镜阵列制备方法 |
| CN116068775B (zh) * | 2023-01-31 | 2024-04-26 | 西安交通大学 | 一种多波长异形光束的整形装置及方法 |
| EP4535070A1 (en) * | 2023-10-05 | 2025-04-09 | Pasqal | A device for dynamical adaptation of the phase of an input laser beam and associated system for generating trapping sites for particles |
| EP4632468A1 (en) | 2024-04-12 | 2025-10-15 | UAB "Ekspla" | Laser beam apodizator for high-energy laser systems, high-energy laser system, and generation method of high-energy laser radiation |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US3476463A (en) | 1965-05-11 | 1969-11-04 | Perkin Elmer Corp | Coherent light optical system yielding an output beam of desired intensity distribution at a desired equiphase surface |
| US3486808A (en) | 1966-03-14 | 1969-12-30 | Bausch & Lomb | Gradient refractive index optical lenses |
| US3558208A (en) | 1967-10-11 | 1971-01-26 | Rca Corp | Optical compensating filter with selective radial absorption distribution |
| US3977772A (en) | 1974-06-21 | 1976-08-31 | Itek Corporation | Apodized optical system |
| US4017164A (en) | 1974-10-09 | 1977-04-12 | Kms Fusion, Inc. | High power laser apodizer |
| US3990786A (en) | 1974-10-09 | 1976-11-09 | Kms Fusion, Inc. | Apodizer aperture for lasers |
| US4410237A (en) | 1980-09-26 | 1983-10-18 | Massachusetts Institute Of Technology | Method and apparatus for shaping electromagnetic beams |
| US4679911A (en) | 1985-04-01 | 1987-07-14 | The University Of Rochester | Optical apparatus using liquid crystals for shaping the spatial intensity of optical beams having designated wavelengths |
| JP3531014B2 (ja) | 1994-06-22 | 2004-05-24 | 株式会社トプコン | レーザ照準装置 |
| DE19535392A1 (de) | 1995-09-23 | 1997-03-27 | Zeiss Carl Fa | Radial polarisationsdrehende optische Anordnung und Mikrolithographie-Projektionsbelichtungsanlage damit |
| US6259055B1 (en) | 1998-10-26 | 2001-07-10 | Lsp Technologies, Inc. | Apodizers for laser peening systems |
| US6975458B1 (en) | 2001-07-13 | 2005-12-13 | Kurt Kanzler | Method and apparatus for transformation of a gaussian laser beam to a far field diffraction pattern |
| US7019434B2 (en) | 2002-11-08 | 2006-03-28 | Iris Ao, Inc. | Deformable mirror method and apparatus including bimorph flexures and integrated drive |
| CN101793993B (zh) | 2004-01-16 | 2013-04-03 | 卡尔蔡司Smt有限责任公司 | 光学元件、光学布置及系统 |
| US6943964B1 (en) | 2004-06-01 | 2005-09-13 | Southeastern Univ. Research Assn. | Single element laser beam shaper |
| US20070115551A1 (en) | 2005-04-01 | 2007-05-24 | Alexis Spilman | Space-variant waveplate for polarization conversion, methods and applications |
| JP4920041B2 (ja) | 2005-10-04 | 2012-04-18 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 光学系とりわけマイクロリソグラフィック投影露光機における偏光分布に影響を与えるための装置及び方法 |
| US8292441B2 (en) | 2009-02-10 | 2012-10-23 | Optical Physics Company | Deformable mirror |
| US20110037962A1 (en) | 2009-08-17 | 2011-02-17 | Nikon Corporation | Polarization converting unit, illumination optical system, exposure apparatus, and device manufacturing method |
| GB2490502A (en) | 2011-05-03 | 2012-11-07 | Univ Southampton | Space variant polarization converter |
| US10175476B2 (en) | 2012-07-16 | 2019-01-08 | Trustees Of Boston University | Solid immersion microscopy system with deformable mirror for correction of aberrations |
-
2014
- 2014-07-10 LT LT2014090A patent/LT6250B/lt not_active IP Right Cessation
-
2015
- 2015-07-10 LT LTEP15176241.6T patent/LT2965852T/lt unknown
- 2015-07-10 EP EP15176241.6A patent/EP2965852B1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP2965852B1 (en) | 2017-03-08 |
| EP2965852A1 (en) | 2016-01-13 |
| LT6250B (lt) | 2016-02-25 |
| LT2965852T (lt) | 2017-06-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| BB1A | Patent application published |
Effective date: 20160111 |
|
| FG9A | Patent granted |
Effective date: 20160225 |
|
| MM9A | Lapsed patents |
Effective date: 20170710 |