MD2585F1 - Process for semiconductor nanostructures obtaining - Google Patents
Process for semiconductor nanostructures obtaining Download PDFInfo
- Publication number
- MD2585F1 MD2585F1 MD20040137A MD20040137A MD2585F1 MD 2585 F1 MD2585 F1 MD 2585F1 MD 20040137 A MD20040137 A MD 20040137A MD 20040137 A MD20040137 A MD 20040137A MD 2585 F1 MD2585 F1 MD 2585F1
- Authority
- MD
- Moldova
- Prior art keywords
- obtaining
- semiconductor
- semiconductor nanostructures
- carried out
- ion implantation
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 238000000034 method Methods 0.000 title abstract 3
- 239000002086 nanomaterial Substances 0.000 title abstract 3
- 238000005468 ion implantation Methods 0.000 abstract 2
- 230000008021 deposition Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The invention refers to the semiconductor production technology, in particular to the processes for semiconductor nanostructures obtaining. Summary of the invention consists in that the process for obtaining semiconductor nanostructures includes the deposition of a mask onto one of the surfaces of the semiconductor plate, the ion implantation, the electrochemical treatment and removal of the mask. The ion implantation is carried out at the ion energy of at least 30 keV with a dose of up to 1011 cm-2, and the electrochemical treatment is carried out at the current passage with a density of at least 100 mA/cm2. Claims: 1Fig.: 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDA20040137A MD2585G2 (en) | 2004-06-01 | 2004-06-01 | Process for semiconductor nanostructures obtaining |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDA20040137A MD2585G2 (en) | 2004-06-01 | 2004-06-01 | Process for semiconductor nanostructures obtaining |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| MD2585F1 true MD2585F1 (en) | 2004-10-31 |
| MD2585G2 MD2585G2 (en) | 2005-05-31 |
Family
ID=33308445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MDA20040137A MD2585G2 (en) | 2004-06-01 | 2004-06-01 | Process for semiconductor nanostructures obtaining |
Country Status (1)
| Country | Link |
|---|---|
| MD (1) | MD2585G2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| MD2982G2 (en) * | 2005-08-10 | 2006-10-31 | Институт Прикладной Физики Академии Наук Молдовы | Process for obtaining semiconductor nanostructures |
| MD3811G2 (en) * | 2007-11-06 | 2009-08-31 | Институт Прикладной Физики Академии Наук Молдовы | Process for obtaining semiconductor nanostructural zones |
| MD193Z (en) * | 2009-06-04 | 2010-11-30 | Институт Прикладной Физики Академии Наук Молдовы | Process for the obtaining of polysulphide film |
| MD4063C1 (en) * | 2010-02-18 | 2011-03-31 | Технический университет Молдовы | Method for producing nanotubes of titanium dioxide on a titanium substrate |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2192698C1 (en) * | 2001-07-05 | 2002-11-10 | Омский государственный технический университет | Electric motor protective device |
-
2004
- 2004-06-01 MD MDA20040137A patent/MD2585G2/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| MD2585G2 (en) | 2005-05-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| KA4A | Patent for invention lapsed due to non-payment of fees (with right of restoration) | ||
| MM4A | Patent for invention definitely lapsed due to non-payment of fees |