MX356580B - Sensor de fluido de amplio intervalo dinámico basado en una plataforma de nanoalambres. - Google Patents

Sensor de fluido de amplio intervalo dinámico basado en una plataforma de nanoalambres.

Info

Publication number
MX356580B
MX356580B MX2015004671A MX2015004671A MX356580B MX 356580 B MX356580 B MX 356580B MX 2015004671 A MX2015004671 A MX 2015004671A MX 2015004671 A MX2015004671 A MX 2015004671A MX 356580 B MX356580 B MX 356580B
Authority
MX
Mexico
Prior art keywords
nanowires
dynamic range
sensor based
wide dynamic
fluid sensor
Prior art date
Application number
MX2015004671A
Other languages
English (en)
Other versions
MX2015004671A (es
Inventor
Hendrik Klootwijk Johan
Mulder Marcel
Original Assignee
Koninklijke Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Nv filed Critical Koninklijke Philips Nv
Publication of MX2015004671A publication Critical patent/MX2015004671A/es
Publication of MX356580B publication Critical patent/MX356580B/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4146—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS involving nanosized elements, e.g. nanotubes, nanowires
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/117—Shapes of semiconductor bodies
    • H10D62/118—Nanostructure semiconductor bodies
    • H10D62/119—Nanowire, nanosheet or nanotube semiconductor bodies
    • H10D62/121—Nanowire, nanosheet or nanotube semiconductor bodies oriented parallel to substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Electrochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Molecular Biology (AREA)
  • Nanotechnology (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Thin Film Transistor (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Un dispositivo (100) para la detección de una sustancia en una muestra de fluido, el dispositivo comprende: un sustrato (102); una capa aislante (104) dispuesta sobre el sustrato (102); una pluralidad de nanoalambres semiconductores eléctricamente accesibles individualmente (106, 108, 110) dispuestos sobre la capa aislante (104) , cada uno de la pluralidad de nanoalambres está cubierta por un material aislante (202, 204, 206) y dispuestos para detectar la sustancia a través de una característica eléctrica del nanoalambre; y un compartimiento de muestra (118) para proporcionar la muestra de fluido en contacto con cada uno de la pluralidad de nanoalambres; en donde para cada uno de la pluralidad de nanoalambres (106, 108, 110), por lo menos uno de la dimensión transversal, el espesor del aislante y el tipo del material aislante se selecciona de tal manera que cada uno de los nanoalambres tiene un intervalo de detección diferente, y de tal manera que el intervalo dinámico del dispositivo es mayor que el intervalo dinámico de cada uno de los nanoalambres individuales.
MX2015004671A 2012-10-16 2013-10-07 Sensor de fluido de amplio intervalo dinámico basado en una plataforma de nanoalambres. MX356580B (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261714418P 2012-10-16 2012-10-16
PCT/IB2013/059160 WO2014060894A2 (en) 2012-10-16 2013-10-07 Wide dynamic range fluid sensor based on nanowire platform

Publications (2)

Publication Number Publication Date
MX2015004671A MX2015004671A (es) 2015-08-07
MX356580B true MX356580B (es) 2018-06-05

Family

ID=49917673

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2015004671A MX356580B (es) 2012-10-16 2013-10-07 Sensor de fluido de amplio intervalo dinámico basado en una plataforma de nanoalambres.

Country Status (8)

Country Link
US (1) US10126263B2 (es)
EP (1) EP2909617A2 (es)
JP (1) JP6533465B2 (es)
CN (1) CN104737009B (es)
BR (1) BR112015008202B1 (es)
MX (1) MX356580B (es)
RU (1) RU2638130C2 (es)
WO (1) WO2014060894A2 (es)

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WO2017002854A1 (ja) * 2015-06-30 2017-01-05 富士通株式会社 ガスセンサ及びその使用方法
BR112018005093B8 (pt) * 2015-09-16 2023-04-18 Systems & Software Entpr Llc Melhoramento em mecanismos de detecção de líquidos para cartões de circuito
CN105424780B (zh) * 2015-11-26 2018-06-22 深圳代尔夫特电子科技有限公司 一种氮化镓传感器、制备方法和多传感器系统
WO2017104130A1 (ja) 2015-12-16 2017-06-22 パナソニックＩｐマネジメント株式会社 ガスセンサ及びガスセンシングシステム
FR3046243B1 (fr) 2015-12-24 2017-12-22 Commissariat Energie Atomique Capteur nw-fet comportant au moins deux detecteurs distincts a nanofil de semi-conducteur
CN106290525B (zh) * 2016-08-04 2018-08-28 北京大学 一种带正面栅极调控的纳米线生物传感器件及其制备方法
JP2019190829A (ja) * 2016-08-31 2019-10-31 シャープ株式会社 ナノファイバーセンサ
JP6880930B2 (ja) * 2017-03-30 2021-06-02 セイコーエプソン株式会社 センサー
WO2019107165A1 (ja) * 2017-11-30 2019-06-06 東レ株式会社 回路、検知器、無線通信デバイス、水分検知システム、おむつ、報知システムおよび回路の製造方法
US10788375B2 (en) * 2017-12-07 2020-09-29 Tower Semiconductor Ltd. Apparatus, system and method of a temperature sensor
EP3540422B1 (en) * 2018-03-14 2024-01-03 Sciosense B.V. Monolithic gas sensor arrangement, manufacturing method and measurement method
WO2020102880A1 (en) 2018-11-20 2020-05-28 National Research Council Of Canada Sensor platform
WO2020118052A1 (en) * 2018-12-05 2020-06-11 FemtoDx Differential sensor measurement methods and devices
IL289729B2 (en) * 2019-07-12 2025-09-01 Qulab Medical Ltd Electrochemical FET sensor
RU2749070C1 (ru) * 2020-09-17 2021-06-03 Общество С Ограниченной Ответственностью "Крокус Наноэлектроника" (Ооо "Крокус Наноэлектроника") Способ формирования активных структур для микроэлектронных устройств и микроэлектронное устройство, содержащее активные структуры
US11840921B2 (en) 2021-03-02 2023-12-12 Saudi Arabian Oil Company Detecting carbon dioxide leakage in the field
US11414986B1 (en) * 2021-03-02 2022-08-16 Saudi Arabian Oil Company Detecting carbon dioxide leakage in the field
RU2764722C1 (ru) * 2021-08-04 2022-01-19 Общество С Ограниченной Ответственностью "Крокус Наноэлектроника" (Ооо "Крокус Наноэлектроника") Способ формирования активных структур для микроэлектронных устройств на кремниевой подложке и микроэлектронное устройство, содержащее сформированные активные структуры
WO2023242297A1 (en) * 2022-06-15 2023-12-21 Zhen Zhang Fet gas sensor device

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US10436745B2 (en) * 2011-07-12 2019-10-08 University of Pittsburgh— of the Commonwealth System of Higher Education PH sensor system and methods of sensing pH

Also Published As

Publication number Publication date
RU2015118169A (ru) 2016-12-10
JP6533465B2 (ja) 2019-06-19
JP2015531491A (ja) 2015-11-02
WO2014060894A2 (en) 2014-04-24
RU2638130C2 (ru) 2017-12-11
CN104737009A (zh) 2015-06-24
MX2015004671A (es) 2015-08-07
EP2909617A2 (en) 2015-08-26
WO2014060894A3 (en) 2014-07-24
US20160003770A1 (en) 2016-01-07
BR112015008202B1 (pt) 2021-02-09
US10126263B2 (en) 2018-11-13
BR112015008202A2 (pt) 2017-07-04
CN104737009B (zh) 2018-07-13

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