MY100233A - Capacitance pressure sensor. - Google Patents

Capacitance pressure sensor.

Info

Publication number
MY100233A
MY100233A MYPI87002170A MYPI19872170A MY100233A MY 100233 A MY100233 A MY 100233A MY PI87002170 A MYPI87002170 A MY PI87002170A MY PI19872170 A MYPI19872170 A MY PI19872170A MY 100233 A MY100233 A MY 100233A
Authority
MY
Malaysia
Prior art keywords
pressure sensor
capacitance pressure
silicon wafer
diaphragms
locations
Prior art date
Application number
MYPI87002170A
Inventor
A Knecht Thomas
L Frick Roger
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Priority to MYPI87002170A priority Critical patent/MY100233A/en
Publication of MY100233A publication Critical patent/MY100233A/en

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  • Measuring Fluid Pressure (AREA)

Abstract

THE PRESSURE SENSOR (47) IS MADE UP OF A SANDWICH CONSTRUCTION INCLUDING A SILICON WAFER (10) WHICH IS ETCHED FROM ONE SIDE TO MAKE CAVITIES (14) IN A PLURALITY OF DESIRED LOCATIONS TO FORM DEFLECTING DIAPHRAGMS (12), ONE SURFACE OF WHICH ACTS AS A CAPACITOR PLATE. A GLASS LAYER (20) IS METALIZED ON BOTH SIDES AND HAS HOLES DRILLED IN LOCATIONS THAT ALIGN WITH THE DIAPHRAGMS FORMED ON THE SILICON WAFER (10). THE FOUR LAYER SANDWICH IS THEN CUT UP INTO INDIVIDUAL SENSORS (47).(FIG. 3)
MYPI87002170A 1987-09-29 1987-09-29 Capacitance pressure sensor. MY100233A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MYPI87002170A MY100233A (en) 1987-09-29 1987-09-29 Capacitance pressure sensor.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI87002170A MY100233A (en) 1987-09-29 1987-09-29 Capacitance pressure sensor.

Publications (1)

Publication Number Publication Date
MY100233A true MY100233A (en) 1990-05-29

Family

ID=79907244

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI87002170A MY100233A (en) 1987-09-29 1987-09-29 Capacitance pressure sensor.

Country Status (1)

Country Link
MY (1) MY100233A (en)

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