MY124511A - Stabilized alkaline compositions for cleaning microelectronic substrates. - Google Patents
Stabilized alkaline compositions for cleaning microelectronic substrates.Info
- Publication number
- MY124511A MY124511A MYPI20014641A MYPI20014641A MY124511A MY 124511 A MY124511 A MY 124511A MY PI20014641 A MYPI20014641 A MY PI20014641A MY PI20014641 A MYPI20014641 A MY PI20014641A MY 124511 A MY124511 A MY 124511A
- Authority
- MY
- Malaysia
- Prior art keywords
- optionally
- weight
- water
- alkaline compositions
- metal ion
- Prior art date
Links
Landscapes
- Detergent Compositions (AREA)
Abstract
THE INVENTION PROVIDES AQUEOUS ALKALINE COMPOSITIONS USEFUL IN THE MICROELECTRONICS INDUSTRY OF STRIPPING OR CLEANING SEMICONDUCTOR WAFER SUBSTRATES BY REMOVING PHOTORESISIT RESIDUES AND OTHER UNWANTED CONTAMINANTS. THE COMPOSITIONS TYPICALLY CONTAIN (A) ONE OR MORE METAL ION-FREE BASES AT SUFFICIENT AMOUNTS TO PRODUCE A PH OF ABOUT 10 - 13 AND ONE OR MORE BATH STABILIZING AGENTS HAVING AT LEAST ONE PKA IN THE RANGE OF 10-13 TO MAINTAIN THIS PH DURING USE; (B) OPTIONALLY, ABOUT 0.01% TO ABOUT 5% BY WEIGHT (EXPRESSED AS % SiO2) OF A WATER-SOLUBLE METAL ION-FREE SILICATE; (C) OPTIONALLY, ABOUT 0.01% TO ABOUT 10% BY WEIGHT OF ONE OR MORE CHELATING AGENTS; (D) OPTIONALLY, ABOUT 0.01% TO ABOUT 80% BY WEIGHT OF ONE OR MORE WATER-SOLUBLE ORGANIC CO-SOLVENTS; AND (E) OPTIONALLY, ABOUT 0.01% TO ABOUT 1% BY WEIGHT OF A WATER - SOLUBLE SURFACTANT.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/688,559 US6585825B1 (en) | 1998-05-18 | 2000-10-16 | Stabilized alkaline compositions for cleaning microelectronic substrates |
| US09/859,142 US6599370B2 (en) | 2000-10-16 | 2001-05-16 | Stabilized alkaline compositions for cleaning microelectronic substrates |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MY124511A true MY124511A (en) | 2006-06-30 |
Family
ID=78711258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MYPI20014641A MY124511A (en) | 2000-10-16 | 2001-10-04 | Stabilized alkaline compositions for cleaning microelectronic substrates. |
Country Status (1)
| Country | Link |
|---|---|
| MY (1) | MY124511A (en) |
-
2001
- 2001-10-04 MY MYPI20014641A patent/MY124511A/en unknown
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