MY125320A - Magnetic sensing of motion in microfabricated devices - Google Patents

Magnetic sensing of motion in microfabricated devices

Info

Publication number
MY125320A
MY125320A MYPI20004005A MYPI20004005A MY125320A MY 125320 A MY125320 A MY 125320A MY PI20004005 A MYPI20004005 A MY PI20004005A MY PI20004005 A MYPI20004005 A MY PI20004005A MY 125320 A MY125320 A MY 125320A
Authority
MY
Malaysia
Prior art keywords
magnetic
magnetic sensor
motion
magnetic sensing
sensor
Prior art date
Application number
MYPI20004005A
Inventor
Bloechl Peter
P Rossel Christophe
Willemin Michel
Original Assignee
Hitachi Global Storage Tech Netherlands B V
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Global Storage Tech Netherlands B V filed Critical Hitachi Global Storage Tech Netherlands B V
Publication of MY125320A publication Critical patent/MY125320A/en

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

A MAGNETIC SENSING UNIT FOR MEASURING DISPLACEMENTS ON A NANOMETER SCALE IS PROVIDED. A MOVEABLE PART (10) AND A FIXED PART (12) OF A MIBRODEVICE MAGNETIC SENSING UNIT COMPRISES A MAGNETIC ELEMENT (1) HAVING A MAGNETIC FIELD (B) AND A MAGNETIC SENSOR (2); THE MAGNETIC ELEMENT (1) BEING LOCATED ON THE MOVEABLE PART (10) AND THE MAGNETIC SENSOR (2) ON THE FIXED PAT (12), OR ALTERNATIVELY, THE MAGNETIC SENSOR (2) BEING LOCATED ON THE MOVEABLE PART (10) AND THE MAGNETIC ELEMENT (1) ON THE FIXED PART (12). THE MAGNETIC SENSOR (2) AND/OR THE MAGNETIC ELEMENT (1) COMPRISE AN INTEGRAL PART OF THE MICRCODEVICE. THE MAGNETIC ELEMENT (1) AND THE MAGNETIC SENSOR (2) ARE ARRANGED RELATIVE TO EACH OTHER SUCH THAT WHEN THE MOVEABLE PART (10) IS DISPLACED THE CHANGE OF THE MAGNETIC FIELD (B) AT THE MAGNETIC SENSOR (2) IS DETECTABLE BY USE OF THE MAGNETIC SENSOR (2). (FIG.1)
MYPI20004005A 1999-09-10 2000-08-30 Magnetic sensing of motion in microfabricated devices MY125320A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP99810814 1999-09-10

Publications (1)

Publication Number Publication Date
MY125320A true MY125320A (en) 2006-07-31

Family

ID=38721437

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20004005A MY125320A (en) 1999-09-10 2000-08-30 Magnetic sensing of motion in microfabricated devices

Country Status (2)

Country Link
DE (1) DE60037127T2 (en)
MY (1) MY125320A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009048272B3 (en) * 2009-10-05 2011-04-21 Sick Ag Method for positioning magnetic sensor attached to industrial robot, involves detecting measurement signal indicating space between sensor and magnet during movement along sliding path to calculate sensor regulation position

Also Published As

Publication number Publication date
DE60037127T2 (en) 2008-10-02
DE60037127D1 (en) 2007-12-27

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