MY128346A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
MY128346A
MY128346A MYPI9902014A MY128346A MY 128346 A MY128346 A MY 128346A MY PI9902014 A MYPI9902014 A MY PI9902014A MY 128346 A MY128346 A MY 128346A
Authority
MY
Malaysia
Prior art keywords
specimen
electron microscope
scanning electron
collisions
holder
Prior art date
Application number
Inventor
Sudraud Pierre
Corbin Antoine
Sailer Rainer
Bate David John
Original Assignee
Leo Electron Microscopy Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leo Electron Microscopy Ltd filed Critical Leo Electron Microscopy Ltd
Priority to MYPI9902014 priority Critical patent/MY128346A/en
Publication of MY128346A publication Critical patent/MY128346A/en

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

A SCANNING ELECTRON MICROSCOPE HAS MEANS (1, 3) FOR GENERATING A BEAM OF ELECTRONS WHICH IS SCANNED OVER A SPECIMEN (11) HELD WITHIN A HOLDER (12) IN A CHAMBER (5) WHICH CONTAINS A GASEOUS MEDIUM. A NEGATIVE POTENTIAL IS APPLIED TO THE HOLDER (12) SO AS TO GENERATE AN ELECTRIC FIELD WHICH ACCELERATES SECONDARY ELECTRONS, FORMED BY THE INTERACTION OF THE PRIMARY BEAM WITH THE SPECIMEN (11), IN DIRECTION AWAY FROM THE SPECIMEN SURFACE AND INTO A COLLISION ZONE (21) IN THE CHAMBER. IN THAT ZONE, THE ACCELERATED SECONDARY ELECTRONS COLLIDE WITH GAS MOLECULES OF THE GASEOUS MEDIUM, THEREBY INITIATING A CASCADE OF COLLISIONS WHICH, IN EFFECT, AMPLIFIES THE SECONDARY ELECTRON SIGNAL. THAT SIGNAL (WHICH MAY TAKE THE FORM OF PHOTONS GENERATED AS A RESULT OF THE COLLISIONS) IS DETECTED BY DETECTING MEANS (10, 7, SUCH AS A PHOTO-MULTIPLIER). (FIGURE 1)
MYPI9902014 1999-05-21 1999-05-21 Scanning electron microscope MY128346A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MYPI9902014 MY128346A (en) 1999-05-21 1999-05-21 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI9902014 MY128346A (en) 1999-05-21 1999-05-21 Scanning electron microscope

Publications (1)

Publication Number Publication Date
MY128346A true MY128346A (en) 2007-01-31

Family

ID=47278599

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI9902014 MY128346A (en) 1999-05-21 1999-05-21 Scanning electron microscope

Country Status (1)

Country Link
MY (1) MY128346A (en)

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