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Container, Conveyance, Adherence, Positioning, Of Wafer
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Abstract
AN OBJECT OF THIS INVENTION IS TO PROVIDE A WAFER BOAT WITH WHICH, BEFORE A TEACHING OPERATION IS PERFORMED FOR A WAFER LOADING ROBOT, THE SEQUENCE NUMBERS OF WAFER INSERTING GROOVES ARE POSITIVELY AND INSTANTLY DETECTED WITH HIGH ACCURACY.IN THE WAFER BOAT COMPRISING UPPER AND LOWER PLATES AND SUPPORTING RODS (1) CONNECTED BETWEEN THOSE PLATES, MARKS (5) AND (6) REPRESENTING THE SEQUENCE NUMBERS OF WAFER INSERTING GROOVES (4) COUNTED FROM THE TOP OR BOTTOM ONE ARE PLACED ON THE OUTER SIDES OF THE SUPPORTING RODS (1).(FIG 1)