MY137625A - Wafer container with secondary wafer restraint system - Google Patents

Wafer container with secondary wafer restraint system

Info

Publication number
MY137625A
MY137625A MYPI20055448A MY137625A MY 137625 A MY137625 A MY 137625A MY PI20055448 A MYPI20055448 A MY PI20055448A MY 137625 A MY137625 A MY 137625A
Authority
MY
Malaysia
Prior art keywords
wafer
restraint
container
tile
opposing
Prior art date
Application number
Inventor
John Burns
Matthew A Fuller
Jeffery J King
Martin L Forbes
Mark V Smith
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of MY137625A publication Critical patent/MY137625A/en

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

WAFER CONTAINER WITH SECONDARY WAFER RESTRAINT SYSTEM A WAFER CONTAINER PROVIDING IMPROVED IAFER RESTRAINT DURING PHYSICAL SHOCK EVENTS. IN EMBODIMENTS OF THE INVENTION, A SECONDARY WAFER RESTRAINT STRUCTURE DEFINING A 5 PLURALITY OF NOTCHES IS INTERPOSED BETWEEN OPPOSING WAFER RESTRAINT MEMBERS OIL THE DOOR OF TILE CONTAINER. TILE NOTCHES MAY BE DEFINED BY ONE OI MORE CONVERGING EDGES OR SIN FICES INECTING AT A JUNCTION. THE JUNCTIONS ARE POSITIONED SO AS TO ALIGN WITH (HE WAFER RECEIVING PORTIONS OFEACH OPPOSING PAIR OF WAFER RESTRAINT MEMBER SO THAT WHEN ILIC DOOR IS FULLY SEALINGLY ENGAGED WITH TILE ENCLOSURE OF TILE CONTAINER, THE EDGE OF THE VLT'CT IS 10 CONTACTING THE JUNCTION. IN THIS POSITION, ANY VERTICAL MOVEMENT OFTHE WAFER DUE TO SHOCK IMPARIED TO THE CONTAINER CAUSES (LIE WAFER TO CONTACT THE CONVERGMG SURFACES OR EDGES, THEIEBV HUNTING SUCH TNOVCMEN@. 'FHE POSITIONING OF THE SECONDARV WATER RESTRAINT STRUCTURE BCT@CEII AND PROXIMULE OPPOSING FINGERS OF (LIE PRINIARY IKAL`ER RESTRAINT LIMITS DEFLECTION OFILIC WAFER BET%CEN SUPPORT POINTS AND FLICIEBY FURTHER INHIBITS THE IAFCR FIONI 15 "JUMPING" OUT OF1HE SUPPORTS AND CROSS-SLOTTING.
MYPI20055448 2004-11-23 2005-11-22 Wafer container with secondary wafer restraint system MY137625A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US63054604P 2004-11-23 2004-11-23

Publications (1)

Publication Number Publication Date
MY137625A true MY137625A (en) 2009-02-27

Family

ID=39055562

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20055448 MY137625A (en) 2004-11-23 2005-11-22 Wafer container with secondary wafer restraint system

Country Status (3)

Country Link
CN (1) CN101119912A (en)
MY (1) MY137625A (en)
TW (1) TWI363027B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4800155B2 (en) * 2006-09-04 2011-10-26 信越ポリマー株式会社 Substrate storage container and check valve
CN101673696B (en) * 2008-09-12 2011-09-28 家登精密工业股份有限公司 Front-loading wafer cassettes with wafer restraints on the door
US9184077B2 (en) 2013-09-30 2015-11-10 Taiwan Semiconductor Manufacturing Co., Ltd Wafer pod and wafer positioning mechanism thereof
US10535541B2 (en) 2015-12-29 2020-01-14 Taiwan Semiconductor Manufacturing Co., Ltd. Adaptive inset for wafer cassette system
TWI628122B (en) * 2016-03-15 2018-07-01 景碩科技股份有限公司 Card with open and close frame
KR102829296B1 (en) * 2020-05-19 2025-07-02 미라이얼 가부시키가이샤 Substrate storage container

Also Published As

Publication number Publication date
CN101119912A (en) 2008-02-06
TWI363027B (en) 2012-05-01
TW200630280A (en) 2006-09-01

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