MY137919A - Wafer carrier door - Google Patents

Wafer carrier door

Info

Publication number
MY137919A
MY137919A MYPI20044627A MY137919A MY 137919 A MY137919 A MY 137919A MY PI20044627 A MYPI20044627 A MY PI20044627A MY 137919 A MY137919 A MY 137919A
Authority
MY
Malaysia
Prior art keywords
door portion
wafer carrier
carrier door
outer door
inner door
Prior art date
Application number
Inventor
John Burns
Matthew A Fuller
Jeffery J King
Martin L Forbes
Mark V Smith
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of MY137919A publication Critical patent/MY137919A/en

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)

Abstract

A WAFER CARRIER DOOR HAVING AN INNER DOOR PORTION AND AN OUTER DOOR PORTION. THE INNER DOOR PORTION HAS A SUBSTANTIALLY CONTINUOUS INNER SURFACE. THE OUTER DOOR PORTION EXTENDS OVER AT LEAST A PORTION OF THE INNER DOOR PORTION. THE OUTER DOOR PORTION HAS A PLURALITY OF APERTURES FORMED THEREIN. THE OUTER DOOR PORTION IS ATTACHED TO THE INNER DOOR PORTION.
MYPI20044627 2003-11-07 2004-11-08 Wafer carrier door MY137919A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US51823803P 2003-11-07 2003-11-07

Publications (1)

Publication Number Publication Date
MY137919A true MY137919A (en) 2009-03-31

Family

ID=39043025

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20044627 MY137919A (en) 2003-11-07 2004-11-08 Wafer carrier door

Country Status (3)

Country Link
CN (1) CN101111439A (en)
MY (1) MY137919A (en)
TW (1) TWI376008B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104028521A (en) * 2014-06-19 2014-09-10 昆山英博尔电子科技有限公司 Fixed type LED storage-box cleaning tank
CN104043622A (en) * 2014-06-19 2014-09-17 昆山英博尔电子科技有限公司 LED material box cleaning device

Also Published As

Publication number Publication date
TW200525684A (en) 2005-08-01
TWI376008B (en) 2012-11-01
CN101111439A (en) 2008-01-23

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