MY138210A - Wafer container and door with vibration dampening latching mechanism - Google Patents

Wafer container and door with vibration dampening latching mechanism

Info

Publication number
MY138210A
MY138210A MYPI20044624A MY138210A MY 138210 A MY138210 A MY 138210A MY PI20044624 A MYPI20044624 A MY PI20044624A MY 138210 A MY138210 A MY 138210A
Authority
MY
Malaysia
Prior art keywords
latching mechanism
door
enclosure
container
favored
Prior art date
Application number
Inventor
John Burns
Matthew A Fuller
Jeffery J King
Martin L Forbes
Mark V Smith
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of MY138210A publication Critical patent/MY138210A/en

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A CONTAINER (10) FOR HOLDING A PLURALITY OF WAFERS IN AN AXIALLY ALIGNED, GENERALLY PARALLEL SPACED APART ARRANGEMENT INCLUDES AN ENCLOSURE PORTION (12) HAVING A TOP (12A), A BOTTOM (12B), A PAIR OF OPPOSING SIDES (12C, 12D), A BACK (12E) AND AN OPEN FRONT (13). AT LEAST ONE WAFER SUPPORT (15) IS PROVIDED IN THE ENCLOSURE ALONG WITH A KINEMATIC COUPLING (15B) ON THE BOTTOM OF THE ENCLOSURE. THE CONTAINER HAS A DOOR (16) FOR SEALINGLY CLOSING THE OPEN FRONT WHICH INCLUDES A CHASSIS (18) AND AN OPERABLE LATCHING MECHANISM (28) ON THE CHASSIS. THE LATCHING MECHANISM INCLUDES A CAM (50) SELECTIVELY ROTATABLE TO SHIFT THE LATCHING MECHANISM BETWEEN A FIRST FAVORED POSITION AND A SECOND FAVORED POSITION AND AT LEAST ONE VIBRATION DAMPENER FOR DAMPENING VIBRATIONS GENERATED WHEN THE LATCHING MECHANISM IS SHIFTED BETWEEN THE FIRST AND SECOND FAVORED POSITIONS. (FIGURE 3)
MYPI20044624 2003-11-07 2004-11-08 Wafer container and door with vibration dampening latching mechanism MY138210A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US51844203P 2003-11-07 2003-11-07

Publications (1)

Publication Number Publication Date
MY138210A true MY138210A (en) 2009-05-29

Family

ID=39193552

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20044624 MY138210A (en) 2003-11-07 2004-11-08 Wafer container and door with vibration dampening latching mechanism

Country Status (3)

Country Link
CN (1) CN101142129A (en)
MY (1) MY138210A (en)
TW (1) TWI348449B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105064819B (en) * 2015-08-18 2017-03-29 宁波宏都模塑有限公司 Pet cage lockset
CN110203521B (en) * 2019-06-03 2020-09-15 唐山国芯晶源电子有限公司 Wafer turnover box
TWI733345B (en) * 2020-02-21 2021-07-11 迅得機械股份有限公司 Automatic locking device

Also Published As

Publication number Publication date
TW200519019A (en) 2005-06-16
CN101142129A (en) 2008-03-12
TWI348449B (en) 2011-09-11

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