MY140331A - Wafer container with door actuated wafer restraint - Google Patents

Wafer container with door actuated wafer restraint

Info

Publication number
MY140331A
MY140331A MYPI20044761A MY140331A MY 140331 A MY140331 A MY 140331A MY PI20044761 A MYPI20044761 A MY PI20044761A MY 140331 A MY140331 A MY 140331A
Authority
MY
Malaysia
Prior art keywords
wafer
door
container
door frame
restraint means
Prior art date
Application number
Inventor
John Burns
Matthew A Fuller
Jeffery J King
Martin L Forbes
Mark V Smith
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of MY140331A publication Critical patent/MY140331A/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

A CONTAINER FOR HOLDING A WAFER INCLUDES AN ENCLOSURE PORTION HAVING A TOP, A BOTTOM, A PAIR OF OPPOSING SIDES, A BACK AND AN OPPOSING OPEN FRONT DEFINED BY A DOOR FRAME. A DOOR IS SEALINGLY ENGAGEABLE IN THE DOOR FRAME TO CLOSE THE OPEN FRONT. THE CONTAINER FURTHER INCLUDES WAFER RESTRAINT MEANS IN THE ENCLOSURE INCLUDING FIXED WAFER RESTRAINT MEANS AND OPERABLE WAFER RESTRAINT MEANS. THE OPERABLE WAFER RESTRAINT MEANS IS SELECTIVELY POSITIONABLE BY ENGAGING AND DISENGAGING THE DOOR FROM THE DOOR FRAME, AND IS POSITIONED SO TO ENABLE INSERTION OR REMOVAL OF A WAFER FROM THE CONTAINER WHEN THE DOOR IS DISENGAGED FROM THE DOOR FRAME AND POSITIONED SO AS TO COOPERATE WITH THE FIXED WAFER RESTRAINT MEANS TO RESTRAIN THE WAFER IN THE CONTAINER WHEN THE DOOR IS ENGAGED IN THE DOOR FRAME.
MYPI20044761 2003-11-16 2004-11-17 Wafer container with door actuated wafer restraint MY140331A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US52081703P 2003-11-16 2003-11-16

Publications (1)

Publication Number Publication Date
MY140331A true MY140331A (en) 2009-12-31

Family

ID=37674917

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20044761 MY140331A (en) 2003-11-16 2004-11-17 Wafer container with door actuated wafer restraint

Country Status (3)

Country Link
CN (1) CN1906098A (en)
MY (1) MY140331A (en)
TW (2) TWI366547B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009089552A2 (en) 2008-01-13 2009-07-16 Entegris, Inc. Methods and apparatuses for large diameter wafer handling
JP5374640B2 (en) * 2010-04-20 2013-12-25 ミライアル株式会社 Substrate storage container
WO2016046985A1 (en) * 2014-09-26 2016-03-31 ミライアル株式会社 Substrate storing container
TWI733345B (en) * 2020-02-21 2021-07-11 迅得機械股份有限公司 Automatic locking device
CN120051858A (en) * 2022-10-11 2025-05-27 恩特格里斯公司 Unified latch for wafer cassettes

Also Published As

Publication number Publication date
TW200523193A (en) 2005-07-16
CN1906098A (en) 2007-01-31
TWI366547B (en) 2012-06-21
TWI333923B (en) 2010-12-01
TW200526485A (en) 2005-08-16

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